In situ tuning of omnidirectional microelectromechanical-systems microphones to improve performance fit in hearing aids

Sang Soo Je; Jeonghwan Kim; Jere C. Harrison; Michael Kozicki; Junseok Chae

doi:10.1063/1.2989132

In situ tuning of omnidirectional microelectromechanical-systems microphones to improve performance fit in hearing aids

Sang Soo Je, Jeonghwan Kim, Jere C. Harrison, Michael Kozicki, Junseok Chae

Research output: Contribution to journal › Article › peer-review

17 Scopus citations

Abstract

Hearing aids are not a one-size-fits-all solution to hearing problems; they must be uniquely tuned for each wearer. There are currently no low-cost and/or effective methods for in situ tuning. This paper describes a microelectromechanical-systems (MEMS)-based dual omnidirectional microphone that can be tuned by growing metallic nanostructures. The nanostructures are grown on integrated solid electrolyte layers on a suspended parylene diaphragm using an external bias and tune the MEMS microphones in situ thereby limiting mismatch. In our tests, this tuning improved the directivity index from 3.5 (fair directionality) to 4.6 dB (excellent directionality) in normal (room temperature) operating environments.

Original language	English (US)
Article number	123501
Journal	Applied Physics Letters
Volume	93
Issue number	12
DOIs	https://doi.org/10.1063/1.2989132
State	Published - 2008

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.2989132

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abstract = "Hearing aids are not a one-size-fits-all solution to hearing problems; they must be uniquely tuned for each wearer. There are currently no low-cost and/or effective methods for in situ tuning. This paper describes a microelectromechanical-systems (MEMS)-based dual omnidirectional microphone that can be tuned by growing metallic nanostructures. The nanostructures are grown on integrated solid electrolyte layers on a suspended parylene diaphragm using an external bias and tune the MEMS microphones in situ thereby limiting mismatch. In our tests, this tuning improved the directivity index from 3.5 (fair directionality) to 4.6 dB (excellent directionality) in normal (room temperature) operating environments.",

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note = "Funding Information: The authors thank Mr. Yongmo Yang, Ms. Rhonda Steele, the Center for Solid State Electronics Research (CSSER) staff at Arizona State University, and Knowles Electronics for their help. We also appreciate the U.S. National Science Foundation supporting this work under Grant Nos. 0627777 and 0652136.",

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AU - Kozicki, Michael

AU - Chae, Junseok

N1 - Funding Information: The authors thank Mr. Yongmo Yang, Ms. Rhonda Steele, the Center for Solid State Electronics Research (CSSER) staff at Arizona State University, and Knowles Electronics for their help. We also appreciate the U.S. National Science Foundation supporting this work under Grant Nos. 0627777 and 0652136.

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AB - Hearing aids are not a one-size-fits-all solution to hearing problems; they must be uniquely tuned for each wearer. There are currently no low-cost and/or effective methods for in situ tuning. This paper describes a microelectromechanical-systems (MEMS)-based dual omnidirectional microphone that can be tuned by growing metallic nanostructures. The nanostructures are grown on integrated solid electrolyte layers on a suspended parylene diaphragm using an external bias and tune the MEMS microphones in situ thereby limiting mismatch. In our tests, this tuning improved the directivity index from 3.5 (fair directionality) to 4.6 dB (excellent directionality) in normal (room temperature) operating environments.

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In situ tuning of omnidirectional microelectromechanical-systems microphones to improve performance fit in hearing aids

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