In-situ tuning of microdevices for directional microphone applications

Sang Soo Je; Jere C. Harrison; Michael Kozicki; Junseok Chae

doi:10.31438/trf.hh2008.61

In-situ tuning of microdevices for directional microphone applications

Sang Soo Je, Jere C. Harrison, Michael Kozicki, Junseok Chae

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

This paper presents a new method to manipulate microdevices’ membranes using nano-electrodeposits for directional microphones in hearing aid applications. The key to achieving high directionality is to minimize the mismatch of the omni-directional microphones using in-situ tuning by the integrated electrodeposition of metallic nanostructures. The nanostructures can be grown/retracted upon external bias at room temperature. The growth/retraction changes mass/stress distribution on the diaphragm of microdevices to precisely manipulate sensitivities to incoming acoustic waves. The omni-directional microphones are capacitive and have a parylene membrane integrated with the nanostructures. The microphone capacitance can be tuned up to 0.7 dB and acoustic mismatch reduces by 1.2 dB. This represents directivity index (DI) increase of 1.2 dB, which is crucial to achieve high directionality in composite microphones. The technology has many applications, including post-packaging trimming and calibration of micro-devices.

Original language	English (US)
Title of host publication	2008 Solid-State Sensors, Actuators, and Microsystems Workshop
Editors	Kimberly L. Turner, Leland Spangler
Publisher	Transducer Research Foundation
Pages	232-235
Number of pages	4
ISBN (Electronic)	0964002477, 9780964002470
DOIs	https://doi.org/10.31438/trf.hh2008.61
State	Published - 2008
Event	2008 Solid-State Sensors, Actuators, and Microsystems Workshop - Hilton Head Island, United States Duration: Jun 1 2008 → Jun 5 2008

Publication series

Name	Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference	2008 Solid-State Sensors, Actuators, and Microsystems Workshop
Country	United States
City	Hilton Head Island
Period	6/1/08 → 6/5/08

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering
Hardware and Architecture

Access to Document

10.31438/trf.hh2008.61

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Cite this

Je, S. S., Harrison, J. C., Kozicki, M., & Chae, J. (2008). In-situ tuning of microdevices for directional microphone applications. In K. L. Turner, & L. Spangler (Eds.), 2008 Solid-State Sensors, Actuators, and Microsystems Workshop (pp. 232-235). (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). Transducer Research Foundation. https://doi.org/10.31438/trf.hh2008.61

In-situ tuning of microdevices for directional microphone applications. / Je, Sang Soo; Harrison, Jere C.; Kozicki, Michael; Chae, Junseok.

2008 Solid-State Sensors, Actuators, and Microsystems Workshop. ed. / Kimberly L. Turner; Leland Spangler. Transducer Research Foundation, 2008. p. 232-235 (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Je, SS, Harrison, JC, Kozicki, M & Chae, J 2008, In-situ tuning of microdevices for directional microphone applications. in KL Turner & L Spangler (eds), 2008 Solid-State Sensors, Actuators, and Microsystems Workshop. Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop, Transducer Research Foundation, pp. 232-235, 2008 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head Island, United States, 6/1/08. https://doi.org/10.31438/trf.hh2008.61

Je SS, Harrison JC, Kozicki M, Chae J. In-situ tuning of microdevices for directional microphone applications. In Turner KL, Spangler L, editors, 2008 Solid-State Sensors, Actuators, and Microsystems Workshop. Transducer Research Foundation. 2008. p. 232-235. (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). https://doi.org/10.31438/trf.hh2008.61

Je, Sang Soo ; Harrison, Jere C. ; Kozicki, Michael ; Chae, Junseok. / In-situ tuning of microdevices for directional microphone applications. 2008 Solid-State Sensors, Actuators, and Microsystems Workshop. editor / Kimberly L. Turner ; Leland Spangler. Transducer Research Foundation, 2008. pp. 232-235 (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop).

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author = "Je, {Sang Soo} and Harrison, {Jere C.} and Michael Kozicki and Junseok Chae",

note = "Funding Information: The authors would like to acknowledge Mr. Yongmo Yang, the staff of the Center for Solid State Electronics Research (CSSER) at Arizona State University, Prof. Tom Milster{\textquoteright}s group at the University of Arizona, and Knowles electronics for their continuing support. We also appreciate the US National Science Foundation (US NSF) supporting this work under Grant #0627777 and #0652136.; 2008 Solid-State Sensors, Actuators, and Microsystems Workshop ; Conference date: 01-06-2008 Through 05-06-2008",

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N2 - This paper presents a new method to manipulate microdevices’ membranes using nano-electrodeposits for directional microphones in hearing aid applications. The key to achieving high directionality is to minimize the mismatch of the omni-directional microphones using in-situ tuning by the integrated electrodeposition of metallic nanostructures. The nanostructures can be grown/retracted upon external bias at room temperature. The growth/retraction changes mass/stress distribution on the diaphragm of microdevices to precisely manipulate sensitivities to incoming acoustic waves. The omni-directional microphones are capacitive and have a parylene membrane integrated with the nanostructures. The microphone capacitance can be tuned up to 0.7 dB and acoustic mismatch reduces by 1.2 dB. This represents directivity index (DI) increase of 1.2 dB, which is crucial to achieve high directionality in composite microphones. The technology has many applications, including post-packaging trimming and calibration of micro-devices.

AB - This paper presents a new method to manipulate microdevices’ membranes using nano-electrodeposits for directional microphones in hearing aid applications. The key to achieving high directionality is to minimize the mismatch of the omni-directional microphones using in-situ tuning by the integrated electrodeposition of metallic nanostructures. The nanostructures can be grown/retracted upon external bias at room temperature. The growth/retraction changes mass/stress distribution on the diaphragm of microdevices to precisely manipulate sensitivities to incoming acoustic waves. The omni-directional microphones are capacitive and have a parylene membrane integrated with the nanostructures. The microphone capacitance can be tuned up to 0.7 dB and acoustic mismatch reduces by 1.2 dB. This represents directivity index (DI) increase of 1.2 dB, which is crucial to achieve high directionality in composite microphones. The technology has many applications, including post-packaging trimming and calibration of micro-devices.

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