Abstract
This paper presents a new method to manipulate microdevices’ membranes using nano-electrodeposits for directional microphones in hearing aid applications. The key to achieving high directionality is to minimize the mismatch of the omni-directional microphones using in-situ tuning by the integrated electrodeposition of metallic nanostructures. The nanostructures can be grown/retracted upon external bias at room temperature. The growth/retraction changes mass/stress distribution on the diaphragm of microdevices to precisely manipulate sensitivities to incoming acoustic waves. The omni-directional microphones are capacitive and have a parylene membrane integrated with the nanostructures. The microphone capacitance can be tuned up to 0.7 dB and acoustic mismatch reduces by 1.2 dB. This represents directivity index (DI) increase of 1.2 dB, which is crucial to achieve high directionality in composite microphones. The technology has many applications, including post-packaging trimming and calibration of micro-devices.
| Original language | English (US) |
|---|---|
| Title of host publication | 2008 Solid-State Sensors, Actuators, and Microsystems Workshop |
| Editors | Leland Spangler, Kimberly L. Turner |
| Publisher | Transducer Research Foundation |
| Pages | 232-235 |
| Number of pages | 4 |
| ISBN (Electronic) | 9780964002494 |
| State | Published - Jan 1 2008 |
| Event | 2008 Solid-State Sensors, Actuators, and Microsystems Workshop - Hilton Head Island, United States Duration: Jun 1 2008 → Jun 5 2008 |
Publication series
| Name | Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop |
|---|
Conference
| Conference | 2008 Solid-State Sensors, Actuators, and Microsystems Workshop |
|---|---|
| Country | United States |
| City | Hilton Head Island |
| Period | 6/1/08 → 6/5/08 |
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ASJC Scopus subject areas
- Control and Systems Engineering
- Electrical and Electronic Engineering
- Hardware and Architecture
Cite this
In-situ tuning of microdevices for directional microphone applications. / Je, Sang Soo; Harrison, Jere C.; Kozicki, Michael; Chae, Junseok.
2008 Solid-State Sensors, Actuators, and Microsystems Workshop. ed. / Leland Spangler; Kimberly L. Turner. Transducer Research Foundation, 2008. p. 232-235 (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - In-situ tuning of microdevices for directional microphone applications
AU - Je, Sang Soo
AU - Harrison, Jere C.
AU - Kozicki, Michael
AU - Chae, Junseok
PY - 2008/1/1
Y1 - 2008/1/1
N2 - This paper presents a new method to manipulate microdevices’ membranes using nano-electrodeposits for directional microphones in hearing aid applications. The key to achieving high directionality is to minimize the mismatch of the omni-directional microphones using in-situ tuning by the integrated electrodeposition of metallic nanostructures. The nanostructures can be grown/retracted upon external bias at room temperature. The growth/retraction changes mass/stress distribution on the diaphragm of microdevices to precisely manipulate sensitivities to incoming acoustic waves. The omni-directional microphones are capacitive and have a parylene membrane integrated with the nanostructures. The microphone capacitance can be tuned up to 0.7 dB and acoustic mismatch reduces by 1.2 dB. This represents directivity index (DI) increase of 1.2 dB, which is crucial to achieve high directionality in composite microphones. The technology has many applications, including post-packaging trimming and calibration of micro-devices.
AB - This paper presents a new method to manipulate microdevices’ membranes using nano-electrodeposits for directional microphones in hearing aid applications. The key to achieving high directionality is to minimize the mismatch of the omni-directional microphones using in-situ tuning by the integrated electrodeposition of metallic nanostructures. The nanostructures can be grown/retracted upon external bias at room temperature. The growth/retraction changes mass/stress distribution on the diaphragm of microdevices to precisely manipulate sensitivities to incoming acoustic waves. The omni-directional microphones are capacitive and have a parylene membrane integrated with the nanostructures. The microphone capacitance can be tuned up to 0.7 dB and acoustic mismatch reduces by 1.2 dB. This represents directivity index (DI) increase of 1.2 dB, which is crucial to achieve high directionality in composite microphones. The technology has many applications, including post-packaging trimming and calibration of micro-devices.
UR - http://www.scopus.com/inward/record.url?scp=61849158764&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=61849158764&partnerID=8YFLogxK
M3 - Conference contribution
T3 - Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop
SP - 232
EP - 235
BT - 2008 Solid-State Sensors, Actuators, and Microsystems Workshop
A2 - Spangler, Leland
A2 - Turner, Kimberly L.
PB - Transducer Research Foundation
ER -