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In situ tuning of a MEMS microphone using electrodeposited nanostructures
Sang Soo Je, Jere C. Harrison, Michael Kozicki, Bertan Bakkaloglu, Sayfe Kiaei, Junseok Chae
- Solid State Electronics Research Center (CSSER)
- Materials Science and Engineering
- Electrical Engineering
- Nano-Electronics, Arizona Institute of (AINE)
- Applied Nanoionics, Center for (CANi)
- Knowledge Enterprise (KE)
- Adaptive Neural Systems, Center for (ANS)
- Connection One (C1)
- Electrical, Computer, and Energy Engineering, School of (IAFSE-ECEE)
Research output: Contribution to journal › Article › peer-review
8
Scopus
citations