In-situ resistance measurements during ion-induced Pt/Al amorphous phase formation

T. L. Alford, B. Blanpain, L. H. Allen, J. W. Mayer

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Abstract

Ion-induced amorphization of Pt/Al multilayers has been investigated by in-situ resistance measurements and has been correlated with transmission electron microscopy and X-ray diffraction results. The resistance measurements distinguished an initial stage of rapid increase due the formation of an amorphous Al/Pt layer. This layer was believed to have a composition in the range of thermally induced amorphization. The slower final stage of resistance change was attributed to the formation of an amorphous layer with a compositional range extended beyond that found for thermal reactions.

Original languageEnglish (US)
Pages (from-to)401-405
Number of pages5
JournalNuclear Inst. and Methods in Physics Research, B
Volume59-60
Issue numberPART 1
DOIs
StatePublished - Jul 1 1991
Externally publishedYes

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ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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