Ion-induced amorphization of Pt/Al multilayers has been investigated by in-situ resistance measurements and has been correlated with transmission electron microscopy and X-ray diffraction results. The resistance measurements distinguished an initial stage of rapid increase due the formation of an amorphous Al/Pt layer. This layer was believed to have a composition in the range of thermally induced amorphization. The slower final stage of resistance change was attributed to the formation of an amorphous layer with a compositional range extended beyond that found for thermal reactions.
ASJC Scopus subject areas
- Nuclear and High Energy Physics