Abstract
Ion-induced amorphization of Pt/Al multilayers has been investigated by in-situ resistance measurements and has been correlated with transmission electron microscopy and X-ray diffraction results. The resistance measurements distinguished an initial stage of rapid increase due the formation of an amorphous Al/Pt layer. This layer was believed to have a composition in the range of thermally induced amorphization. The slower final stage of resistance change was attributed to the formation of an amorphous layer with a compositional range extended beyond that found for thermal reactions.
Original language | English (US) |
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Pages (from-to) | 401-405 |
Number of pages | 5 |
Journal | Nuclear Inst. and Methods in Physics Research, B |
Volume | 59-60 |
Issue number | PART 1 |
DOIs | |
State | Published - Jul 1 1991 |
Externally published | Yes |
ASJC Scopus subject areas
- Nuclear and High Energy Physics
- Instrumentation