In situ oxidation processes for In III-V compound semiconductors studied by high-resolution electron microscopy

Engineering & Materials Science

• High resolution electron microscopy 100%
• III-V semiconductors 97%
• Oxidation 52%
• Negative ions 39%
• Electron beams 34%
• Desorption 33%
• Crystalline materials 30%
• Crystals 29%
• Electron microscopes 27%
• Semiconductor materials 26%
• Oxides 25%
• Substrates 20%
• Metals 18%

Physics & Astronomy

• electron microscopy 50%
• oxidation 43%
• high resolution 35%
• amorphous materials 34%
• anions 27%
• desorption 26%
• surface layers 25%
• electron microscopes 23%
• electron beams 21%
• oxides 18%
• metals 15%
• crystals 14%

Chemical Compounds

• Semiconductor 44%
• Amorphous Material 40%
• Oxidation Reaction 26%
• Desorption 22%
• Surface 18%
• Anion 17%
• Electron Particle 15%
• Oxide 15%
• Metal 13%
• Amount 12%