Abstract

We demonstrate a significant improvement in the quality factor (Q) of film bulk acoustic resonators (FBARs) in liquid environments via the integration of microfluidic channels. Our device consists of a longitudinal-mode excited zinc oxide (ZnO) FBAR and parylene-encapsulated microfluidic channels. Considerable enhancement in the Q of the resonant system is obtained by confining the liquid in the microfluidic channels of thickness comparable to the acoustic wavelength. The improved FBAR achieves Q values of up to 120, which represents an improvement of a factor of eight over those of current state-of-the-art devices.

Original languageEnglish (US)
Pages (from-to)647-649
Number of pages3
JournalIEEE Electron Device Letters
Volume30
Issue number6
DOIs
StatePublished - May 18 2009

Keywords

  • Acoustic resonators
  • Microelectromechanical devices
  • Piezoelectric resonators
  • Q factor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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