In-liquid quality factor improvement for film bulk acoustic resonators by integration of microfluidic channels

Wencheng Xu; Zhang Xu; Hongyu Yu; Abbas Abbaspour-Tamijani; Junseok Chae

doi:10.1109/LED.2009.2019973

In-liquid quality factor improvement for film bulk acoustic resonators by integration of microfluidic channels

Wencheng Xu, Zhang Xu, Hongyu Yu, Abbas Abbaspour-Tamijani, Junseok Chae

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

We demonstrate a significant improvement in the quality factor (Q) of film bulk acoustic resonators (FBARs) in liquid environments via the integration of microfluidic channels. Our device consists of a longitudinal-mode excited zinc oxide (ZnO) FBAR and parylene-encapsulated microfluidic channels. Considerable enhancement in the Q of the resonant system is obtained by confining the liquid in the microfluidic channels of thickness comparable to the acoustic wavelength. The improved FBAR achieves Q values of up to 120, which represents an improvement of a factor of eight over those of current state-of-the-art devices.

Original language	English (US)
Pages (from-to)	647-649
Number of pages	3
Journal	IEEE Electron Device Letters
Volume	30
Issue number	6
DOIs	https://doi.org/10.1109/LED.2009.2019973
State	Published - 2009

Keywords

Acoustic resonators
Microelectromechanical devices
Piezoelectric resonators
Q factor

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/LED.2009.2019973

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title = "In-liquid quality factor improvement for film bulk acoustic resonators by integration of microfluidic channels",

abstract = "We demonstrate a significant improvement in the quality factor (Q) of film bulk acoustic resonators (FBARs) in liquid environments via the integration of microfluidic channels. Our device consists of a longitudinal-mode excited zinc oxide (ZnO) FBAR and parylene-encapsulated microfluidic channels. Considerable enhancement in the Q of the resonant system is obtained by confining the liquid in the microfluidic channels of thickness comparable to the acoustic wavelength. The improved FBAR achieves Q values of up to 120, which represents an improvement of a factor of eight over those of current state-of-the-art devices.",

keywords = "Acoustic resonators, Microelectromechanical devices, Piezoelectric resonators, Q factor",

author = "Wencheng Xu and Zhang Xu and Hongyu Yu and Abbas Abbaspour-Tamijani and Junseok Chae",

note = "Funding Information: Manuscript received February 18, 2009; revised March 16, 2009. First published May 12, 2009; current version published May 27, 2009. This work was supported by the National Science Foundation under Grant 0741834. The review of this letter was arranged by Editor A. Nathan.",

year = "2009",

doi = "10.1109/LED.2009.2019973",

language = "English (US)",

volume = "30",

pages = "647--649",

journal = "IEEE Electron Device Letters",

issn = "0741-3106",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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T1 - In-liquid quality factor improvement for film bulk acoustic resonators by integration of microfluidic channels

AU - Xu, Wencheng

AU - Xu, Zhang

AU - Yu, Hongyu

AU - Abbaspour-Tamijani, Abbas

AU - Chae, Junseok

N1 - Funding Information: Manuscript received February 18, 2009; revised March 16, 2009. First published May 12, 2009; current version published May 27, 2009. This work was supported by the National Science Foundation under Grant 0741834. The review of this letter was arranged by Editor A. Nathan.

PY - 2009

Y1 - 2009

N2 - We demonstrate a significant improvement in the quality factor (Q) of film bulk acoustic resonators (FBARs) in liquid environments via the integration of microfluidic channels. Our device consists of a longitudinal-mode excited zinc oxide (ZnO) FBAR and parylene-encapsulated microfluidic channels. Considerable enhancement in the Q of the resonant system is obtained by confining the liquid in the microfluidic channels of thickness comparable to the acoustic wavelength. The improved FBAR achieves Q values of up to 120, which represents an improvement of a factor of eight over those of current state-of-the-art devices.

AB - We demonstrate a significant improvement in the quality factor (Q) of film bulk acoustic resonators (FBARs) in liquid environments via the integration of microfluidic channels. Our device consists of a longitudinal-mode excited zinc oxide (ZnO) FBAR and parylene-encapsulated microfluidic channels. Considerable enhancement in the Q of the resonant system is obtained by confining the liquid in the microfluidic channels of thickness comparable to the acoustic wavelength. The improved FBAR achieves Q values of up to 120, which represents an improvement of a factor of eight over those of current state-of-the-art devices.

KW - Acoustic resonators

KW - Microelectromechanical devices

KW - Piezoelectric resonators

KW - Q factor

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JO - IEEE Electron Device Letters

JF - IEEE Electron Device Letters

IS - 6

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In-liquid quality factor improvement for film bulk acoustic resonators by integration of microfluidic channels

Abstract

Keywords

ASJC Scopus subject areas

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