Improved high frequency response and quality factor of on-chip ferromagnetic thin film inductors by laminating and patterning Co-Zr-Ta-B films

Hao Wu, Shirong Zhao, Donald S. Gardner, Hongbin Yu

Research output: Contribution to journalArticle

14 Scopus citations

Abstract

In this work, we report the improvement of high frequency response and quality factor of on-chip inductors by integrating ferromagnetic thin films (Co-Zr-Ta-B) including two different combinations of laminations and 500 nm thick non-laminated film. Up to 4.2X increase in inductance and 5X increase in quality factor (Q) was obtained from 4-turn spiral inductors incorporated with 50 nm by 10 laminated films with a peak Q at 500 MHz. Effects of patterning magnetic film have also been investigated by changing magnetic thin film aspect ratio. It was demonstrated that the peak Q can be pushed towards using higher frequencies as high as 1 GHz by a combination of patterning magnetic films into fine bars and laminations.

Original languageEnglish (US)
Article number6559171
Pages (from-to)4176-4179
Number of pages4
JournalIEEE Transactions on Magnetics
Volume49
Issue number7
DOIs
StatePublished - Aug 2 2013

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Keywords

  • Magnetic thin film
  • On-chip inductors
  • Patterned laminations
  • Radio frequency (RF)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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