Improved frequency response of on-chip inductors with patterned magnetic dots

Wei Xu; Saurabh Sinha; Feng Pan; Tawab Dastagir; Yu Cao; Hongbin Yu

doi:10.1109/LED.2009.2039112

Improved frequency response of on-chip inductors with patterned magnetic dots

Wei Xu, Saurabh Sinha, Feng Pan, Tawab Dastagir, Yu Cao, Hongbin Yu

Research output: Contribution to journal › Article › peer-review

30 Scopus citations

Abstract

Single-turn spiral inductors with magnetic material to enhance inductance are fabricated. Using double-layered Permalloy dots above and below the inductor metal, inductance improves and remains constant beyond 10 GHz with a Q factor around 11 and a peak frequency around 9 GHz. By employing single-turn small-sized inductors, the self-resonance frequency of the inductors is shifted to very high frequencies. It is illustrated that the superior frequency response is mainly attributed to the significant reduction in mutual inductive coupling between a magnetic layer and inductor metal wires.

Original language	English (US)
Article number	5404426
Pages (from-to)	207-209
Number of pages	3
Journal	IEEE Electron Device Letters
Volume	31
Issue number	3
DOIs	https://doi.org/10.1109/LED.2009.2039112
State	Published - Mar 2010

Keywords

Coupling
High frequency
Inductance
Magnetic materials
Patterned dots
Permalloy
Spiral inductor

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/LED.2009.2039112

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title = "Improved frequency response of on-chip inductors with patterned magnetic dots",

abstract = "Single-turn spiral inductors with magnetic material to enhance inductance are fabricated. Using double-layered Permalloy dots above and below the inductor metal, inductance improves and remains constant beyond 10 GHz with a Q factor around 11 and a peak frequency around 9 GHz. By employing single-turn small-sized inductors, the self-resonance frequency of the inductors is shifted to very high frequencies. It is illustrated that the superior frequency response is mainly attributed to the significant reduction in mutual inductive coupling between a magnetic layer and inductor metal wires.",

keywords = "Coupling, High frequency, Inductance, Magnetic materials, Patterned dots, Permalloy, Spiral inductor",

author = "Wei Xu and Saurabh Sinha and Feng Pan and Tawab Dastagir and Yu Cao and Hongbin Yu",

note = "Funding Information: Manuscript received November 13, 2009; revised December 10, 2009. First published February 2, 2010; current version published February 24, 2010. This work was supported in part by the National Science Foundation under Grant 0727100. The review of this letter was arranged by Editor A. Z. Wang.",

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doi = "10.1109/LED.2009.2039112",

language = "English (US)",

volume = "31",

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publisher = "Institute of Electrical and Electronics Engineers Inc.",

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AU - Xu, Wei

AU - Sinha, Saurabh

AU - Pan, Feng

AU - Dastagir, Tawab

AU - Cao, Yu

AU - Yu, Hongbin

N1 - Funding Information: Manuscript received November 13, 2009; revised December 10, 2009. First published February 2, 2010; current version published February 24, 2010. This work was supported in part by the National Science Foundation under Grant 0727100. The review of this letter was arranged by Editor A. Z. Wang.

PY - 2010/3

Y1 - 2010/3

N2 - Single-turn spiral inductors with magnetic material to enhance inductance are fabricated. Using double-layered Permalloy dots above and below the inductor metal, inductance improves and remains constant beyond 10 GHz with a Q factor around 11 and a peak frequency around 9 GHz. By employing single-turn small-sized inductors, the self-resonance frequency of the inductors is shifted to very high frequencies. It is illustrated that the superior frequency response is mainly attributed to the significant reduction in mutual inductive coupling between a magnetic layer and inductor metal wires.

AB - Single-turn spiral inductors with magnetic material to enhance inductance are fabricated. Using double-layered Permalloy dots above and below the inductor metal, inductance improves and remains constant beyond 10 GHz with a Q factor around 11 and a peak frequency around 9 GHz. By employing single-turn small-sized inductors, the self-resonance frequency of the inductors is shifted to very high frequencies. It is illustrated that the superior frequency response is mainly attributed to the significant reduction in mutual inductive coupling between a magnetic layer and inductor metal wires.

KW - Coupling

KW - High frequency

KW - Inductance

KW - Magnetic materials

KW - Patterned dots

KW - Permalloy

KW - Spiral inductor

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JO - IEEE Electron Device Letters

JF - IEEE Electron Device Letters

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ER -

Improved frequency response of on-chip inductors with patterned magnetic dots

Abstract

Keywords

ASJC Scopus subject areas

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