Improved frequency response of on-chip inductors with patterned magnetic dots

Wei Xu, Saurabh Sinha, Feng Pan, Tawab Dastagir, Yu Cao, Hongbin Yu

Research output: Contribution to journalArticlepeer-review

28 Scopus citations

Abstract

Single-turn spiral inductors with magnetic material to enhance inductance are fabricated. Using double-layered Permalloy dots above and below the inductor metal, inductance improves and remains constant beyond 10 GHz with a Q factor around 11 and a peak frequency around 9 GHz. By employing single-turn small-sized inductors, the self-resonance frequency of the inductors is shifted to very high frequencies. It is illustrated that the superior frequency response is mainly attributed to the significant reduction in mutual inductive coupling between a magnetic layer and inductor metal wires.

Original languageEnglish (US)
Article number5404426
Pages (from-to)207-209
Number of pages3
JournalIEEE Electron Device Letters
Volume31
Issue number3
DOIs
StatePublished - Mar 1 2010

Keywords

  • Coupling
  • High frequency
  • Inductance
  • Magnetic materials
  • Patterned dots
  • Permalloy
  • Spiral inductor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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