Improved amorphous/crystalline silicon interface passivation by hydrogen plasma treatment

A. Descoeudres, L. Barraud, Stefaan De Wolf, B. Strahm, D. Lachenal, C. Guérin, Z. C. Holman, F. Zicarelli, B. Demaurex, J. Seif, J. Holovsky, C. Ballif

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Physics & Astronomy