Implementation of surface roughness scattering in Monte Carlo modeling of thin SOI MOSFETs using the effective potential

Stephen M. Ramey, David K. Ferry

Research output: Contribution to journalArticle

20 Scopus citations


In Monte Carlo simulations of carriers in confined layers, quantum mechanical effects render ineffective the reflection boundary condition method of including surface roughness scattering. Therefore, to include the effects of both the quantum confinement and surface roughness in thin silicon on insulator (SOI) MOSFETs, the surface roughness must be handled differently. In this paper, we include the surface roughness as an additional scattering mechanism in a three-dimensional Poisson-ensemble Monte Carlo simulation that includes the quantum mechanical effects with the effective potential. We find that this method yields appropriate results for both the quantum confinement and surface roughness, provided adequate steps are taken when implementing the surface roughness scattering rate.

Original languageEnglish (US)
Pages (from-to)110-114
Number of pages5
JournalIEEE Transactions on Nanotechnology
Issue number2
StatePublished - Jun 1 2003



  • Monte Carlo methods
  • Quantum theory
  • Semiconductor-insulator interfaces
  • Silicon on insulator (SOI) technology

ASJC Scopus subject areas

  • Computer Science Applications
  • Electrical and Electronic Engineering

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