IMAGING WITH RUTHERFORD SCATTERED ELECTRONS IN THE SCANNING TRANSMISSION ELECTRON MICROSCOPE.

Research output: Contribution to journalArticle

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Abstract

Rutherford scattering of fast electrons in thin films has four characteristics of interest to the analytical electron microscopist. (i) The scattering has a strong dependence on atomic number Z; (ii) it has a high yield at wide scattering angles; (iii) the interaction with the atom is highly localized, and (iv) the scattering is elastic. In this paper the discussion concentrates in particular on (i) the 'Z-contrast' technique, where it is shown that the use of an annular detector collecting at high scattering angles only can considerably improve the Z-dependence of the annular detector signal, and (ii) the 'low-loss' surface imaging technique. It is demonstrated how the technique can be modified for use in a Scanning Transmission Electron Microscope to allow transmission and surface images from the same area of a thin film.

Original languageEnglish (US)
Pages (from-to)185-197
Number of pages13
JournalScanning Electron Microscopy
StatePublished - Jan 1 1981
Externally publishedYes

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Biophysics

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