Abstract
Rutherford scattering of fast electrons in thin films has four characteristics of interest to the analytical electron microscopist. (i) The scattering has a strong dependence on atomic number Z; (ii) it has a high yield at wide scattering angles; (iii) the interaction with the atom is highly localized, and (iv) the scattering is elastic. In this paper the discussion concentrates in particular on (i) the 'Z-contrast' technique, where it is shown that the use of an annular detector collecting at high scattering angles only can considerably improve the Z-dependence of the annular detector signal, and (ii) the 'low-loss' surface imaging technique. It is demonstrated how the technique can be modified for use in a Scanning Transmission Electron Microscope to allow transmission and surface images from the same area of a thin film.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 185-197 |
| Number of pages | 13 |
| Journal | Scanning Electron Microscopy |
| State | Published - 1981 |
| Externally published | Yes |
ASJC Scopus subject areas
- Control and Systems Engineering
- Biophysics