Rutherford scattering of fast electrons in thin films has four characteristics of interest to the analytical electron microscopist. (i) The scattering has a strong dependence on atomic number Z; (ii) it has a high yield at wide scattering angles; (iii) the interaction with the atom is highly localized, and (iv) the scattering is elastic. In this paper the discussion concentrates in particular on (i) the 'Z-contrast' technique, where it is shown that the use of an annular detector collecting at high scattering angles only can considerably improve the Z-dependence of the annular detector signal, and (ii) the 'low-loss' surface imaging technique. It is demonstrated how the technique can be modified for use in a Scanning Transmission Electron Microscope to allow transmission and surface images from the same area of a thin film.
|Original language||English (US)|
|Number of pages||13|
|Journal||Scanning Electron Microscopy|
|State||Published - Jan 1 1981|
ASJC Scopus subject areas
- Control and Systems Engineering