IMAGING WITH RUTHERFORD SCATTERED ELECTRONS IN THE SCANNING TRANSMISSION ELECTRON MICROSCOPE.

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Abstract

Rutherford scattering of fast electrons in thin films has four characteristics of interest to the analytical electron microscopist. (i) The scattering has a strong dependence on atomic number Z; (ii) it has a high yield at wide scattering angles; (iii) the interaction with the atom is highly localized, and (iv) the scattering is elastic. In this paper the discussion concentrates in particular on (i) the 'Z-contrast' technique, where it is shown that the use of an annular detector collecting at high scattering angles only can considerably improve the Z-dependence of the annular detector signal, and (ii) the 'low-loss' surface imaging technique. It is demonstrated how the technique can be modified for use in a Scanning Transmission Electron Microscope to allow transmission and surface images from the same area of a thin film.

Original languageEnglish (US)
Pages (from-to)185-197
Number of pages13
JournalScanning Electron Microscopy
StatePublished - 1981
Externally publishedYes

Fingerprint

Electron microscopes
Scattering
Electrons
Scanning
Imaging techniques
Detectors
Thin films
Elastic scattering
Atoms

ASJC Scopus subject areas

  • Biophysics
  • Control and Systems Engineering

Cite this

@article{d12ed76b4be446069216140ef75a3060,
title = "IMAGING WITH RUTHERFORD SCATTERED ELECTRONS IN THE SCANNING TRANSMISSION ELECTRON MICROSCOPE.",
abstract = "Rutherford scattering of fast electrons in thin films has four characteristics of interest to the analytical electron microscopist. (i) The scattering has a strong dependence on atomic number Z; (ii) it has a high yield at wide scattering angles; (iii) the interaction with the atom is highly localized, and (iv) the scattering is elastic. In this paper the discussion concentrates in particular on (i) the 'Z-contrast' technique, where it is shown that the use of an annular detector collecting at high scattering angles only can considerably improve the Z-dependence of the annular detector signal, and (ii) the 'low-loss' surface imaging technique. It is demonstrated how the technique can be modified for use in a Scanning Transmission Electron Microscope to allow transmission and surface images from the same area of a thin film.",
author = "Michael Treacy",
year = "1981",
language = "English (US)",
pages = "185--197",
journal = "Scanning Electron Microscopy",
issn = "0586-5581",
publisher = "Scanning Microscopy International",

}

TY - JOUR

T1 - IMAGING WITH RUTHERFORD SCATTERED ELECTRONS IN THE SCANNING TRANSMISSION ELECTRON MICROSCOPE.

AU - Treacy, Michael

PY - 1981

Y1 - 1981

N2 - Rutherford scattering of fast electrons in thin films has four characteristics of interest to the analytical electron microscopist. (i) The scattering has a strong dependence on atomic number Z; (ii) it has a high yield at wide scattering angles; (iii) the interaction with the atom is highly localized, and (iv) the scattering is elastic. In this paper the discussion concentrates in particular on (i) the 'Z-contrast' technique, where it is shown that the use of an annular detector collecting at high scattering angles only can considerably improve the Z-dependence of the annular detector signal, and (ii) the 'low-loss' surface imaging technique. It is demonstrated how the technique can be modified for use in a Scanning Transmission Electron Microscope to allow transmission and surface images from the same area of a thin film.

AB - Rutherford scattering of fast electrons in thin films has four characteristics of interest to the analytical electron microscopist. (i) The scattering has a strong dependence on atomic number Z; (ii) it has a high yield at wide scattering angles; (iii) the interaction with the atom is highly localized, and (iv) the scattering is elastic. In this paper the discussion concentrates in particular on (i) the 'Z-contrast' technique, where it is shown that the use of an annular detector collecting at high scattering angles only can considerably improve the Z-dependence of the annular detector signal, and (ii) the 'low-loss' surface imaging technique. It is demonstrated how the technique can be modified for use in a Scanning Transmission Electron Microscope to allow transmission and surface images from the same area of a thin film.

UR - http://www.scopus.com/inward/record.url?scp=0019670527&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0019670527&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0019670527

SP - 185

EP - 197

JO - Scanning Electron Microscopy

JF - Scanning Electron Microscopy

SN - 0586-5581

ER -