HYDROGEN ENVIRONMENTS AND DEFECTS IN PLASMA-DEPOSITED a-Si

H.

D. K. Biegelsen, G. Lucovsky, J. C. Knights, Robert Nemanich

Research output: Chapter in Book/Report/Conference proceedingChapter

2 Citations (Scopus)

Abstract

A model for defects in a-Si:H has been deduced from experiments on samples prepared under widely varying conditions. Defects seem to be localized low density regions induced by and containing short polymeric SiH//x units. For high spin samples, the material is effectively a highly cross-linked polymer; for low spin samples, the defects are widely separated.

Original languageEnglish (US)
Title of host publicationInst Phys Conf Ser
Place of PublicationLondon, Engl
PublisherInst of Phys
Pages1143-1146
Number of pages4
Edition43
StatePublished - 1979
Externally publishedYes
EventPap from the Int Conf on the Phys of Semicond, 14th - Edinburgh, Scotl
Duration: Sep 4 1978Sep 8 1978

Other

OtherPap from the Int Conf on the Phys of Semicond, 14th
CityEdinburgh, Scotl
Period9/4/789/8/78

Fingerprint

Plasmas
Hydrogen
Defects
Polymers
Experiments

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Biegelsen, D. K., Lucovsky, G., Knights, J. C., & Nemanich, R. (1979). HYDROGEN ENVIRONMENTS AND DEFECTS IN PLASMA-DEPOSITED a-Si: H. In Inst Phys Conf Ser (43 ed., pp. 1143-1146). London, Engl: Inst of Phys.

HYDROGEN ENVIRONMENTS AND DEFECTS IN PLASMA-DEPOSITED a-Si : H. / Biegelsen, D. K.; Lucovsky, G.; Knights, J. C.; Nemanich, Robert.

Inst Phys Conf Ser. 43. ed. London, Engl : Inst of Phys, 1979. p. 1143-1146.

Research output: Chapter in Book/Report/Conference proceedingChapter

Biegelsen, DK, Lucovsky, G, Knights, JC & Nemanich, R 1979, HYDROGEN ENVIRONMENTS AND DEFECTS IN PLASMA-DEPOSITED a-Si: H. in Inst Phys Conf Ser. 43 edn, Inst of Phys, London, Engl, pp. 1143-1146, Pap from the Int Conf on the Phys of Semicond, 14th, Edinburgh, Scotl, 9/4/78.
Biegelsen DK, Lucovsky G, Knights JC, Nemanich R. HYDROGEN ENVIRONMENTS AND DEFECTS IN PLASMA-DEPOSITED a-Si: H. In Inst Phys Conf Ser. 43 ed. London, Engl: Inst of Phys. 1979. p. 1143-1146
Biegelsen, D. K. ; Lucovsky, G. ; Knights, J. C. ; Nemanich, Robert. / HYDROGEN ENVIRONMENTS AND DEFECTS IN PLASMA-DEPOSITED a-Si : H. Inst Phys Conf Ser. 43. ed. London, Engl : Inst of Phys, 1979. pp. 1143-1146
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