Abstract
Pt/SiC was reported to have more stable and better electrical properties than other metal/6H-SiC after annealing above 700°C under UHV condition. In this study, the microstructure of the Pt/SiC interface is characterized after high temperature annealing in UHV at near atomic resolution and the first nanospectroscopic energy loss data for the system is reported.
Original language | English (US) |
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Title of host publication | Proceedings - Annual Meeting, Microscopy Society of America |
Publisher | Publ by San Francisco Press Inc |
Pages | 832-833 |
Number of pages | 2 |
State | Published - 1993 |
Event | Proceedings of the 51st Annual Meeting Microscopy Society of America - Cincinnati, OH, USA Duration: Aug 1 1993 → Aug 6 1993 |
Other
Other | Proceedings of the 51st Annual Meeting Microscopy Society of America |
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City | Cincinnati, OH, USA |
Period | 8/1/93 → 8/6/93 |
ASJC Scopus subject areas
- Engineering(all)