TY - JOUR
T1 - Homoepitaxial growth of (0 0 0 1)- and (0 0 0 1̄) -oriented ZnO thin films via metalorganic vapor-phase epitaxy and their characterization
AU - Smith, T. P.
AU - McLean, H.
AU - Smith, David
AU - Davis, R. F.
N1 - Funding Information:
This research was partially supported by the Kenan Institute for Technology, Engineering and Science at NCSU. Dr. R. F. Davis was partially supported by the Kobe Steel Ltd. Professorship. The authors express their appreciation to Mike Salmon of the Analytical Instrumentation Facility at NCSU for assistance with the AFM and to Drs. Dave Eason and Gene Cantwell for helpful discussions regarding various aspects of ZnO. We acknowledge the use of the facilities in the Center for High Resolution Electron Microscopy at Arizona State University.
PY - 2004/5/1
Y1 - 2004/5/1
N2 - Homoepitaxial ZnO films have been grown via metalorganic vapor-phase epitaxy on O- and Zn-terminated basal-plane-oriented ZnO substrates. Maps of on-axis X-ray rocking curves obtained over 2-in-diameter ZnO{0001} wafers, diced from boules produced by vapor phase transport, revealed well-defined areas that ranged from <50 to >1050arcsec FWHM, indicating the presence of tilted domains. This macrostructure was manifested in all the homoepitaxial ZnO films deposited on these wafers. The films grown on O-terminated ZnO surfaces were initially dense. However, they changed to a textured polycrystalline microstructure after ≈100nm and possessed a surface roughness of 7.3nm. By contrast, the films grown on the Zn-terminated surface under the same conditions were fully dense, without texture and appeared to be monocrystalline with a significantly improved surface roughness of 3.4nm. Cross-sectional transmission electron microscopy of the wafers revealed high densities of edge dislocations and stacking faults with associated Frank partial dislocations.
AB - Homoepitaxial ZnO films have been grown via metalorganic vapor-phase epitaxy on O- and Zn-terminated basal-plane-oriented ZnO substrates. Maps of on-axis X-ray rocking curves obtained over 2-in-diameter ZnO{0001} wafers, diced from boules produced by vapor phase transport, revealed well-defined areas that ranged from <50 to >1050arcsec FWHM, indicating the presence of tilted domains. This macrostructure was manifested in all the homoepitaxial ZnO films deposited on these wafers. The films grown on O-terminated ZnO surfaces were initially dense. However, they changed to a textured polycrystalline microstructure after ≈100nm and possessed a surface roughness of 7.3nm. By contrast, the films grown on the Zn-terminated surface under the same conditions were fully dense, without texture and appeared to be monocrystalline with a significantly improved surface roughness of 3.4nm. Cross-sectional transmission electron microscopy of the wafers revealed high densities of edge dislocations and stacking faults with associated Frank partial dislocations.
KW - A1. Crystal morphology
KW - A1. Dislocations
KW - A1. Stacking faults
KW - A1. X-ray diffraction
KW - A3. Organometallic vapor phase deposition
KW - B1. ZnO
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U2 - 10.1016/j.jcrysgro.2004.02.096
DO - 10.1016/j.jcrysgro.2004.02.096
M3 - Article
AN - SCOPUS:1942473079
SN - 0022-0248
VL - 265
SP - 390
EP - 398
JO - Journal of Crystal Growth
JF - Journal of Crystal Growth
IS - 3-4
ER -