Highly linear, ultra sensitive bio-MEMS force sensors with large force measurement range

J. Rajagopalan, A. Tofangchi, M.T. A. Saif

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Highly linear, ultra sensitive bio-MEMS force sensors with large force measurement range
State	Published - 2010
Event	IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Duration: Jan 1 2010 → …

Conference	IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)
Period	1/1/10 → …

Cite this

@inproceedings{aa9ad051ca744c0fb74e0ab375912ad0,

title = "Highly linear, ultra sensitive bio-MEMS force sensors with large force measurement range",

author = "J. Rajagopalan and A. Tofangchi and Saif, {M.T. A.}",

year = "2010",

language = "English",

booktitle = "Highly linear, ultra sensitive bio-MEMS force sensors with large force measurement range",

note = "IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) ; Conference date: 01-01-2010",

}

TY - GEN

T1 - Highly linear, ultra sensitive bio-MEMS force sensors with large force measurement range

AU - Rajagopalan, J.

AU - Tofangchi, A.

AU - Saif, M.T. A.

PY - 2010

Y1 - 2010

M3 - Conference contribution

BT - Highly linear, ultra sensitive bio-MEMS force sensors with large force measurement range

T2 - IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)

Y2 - 1 January 2010

ER -