Highly linear, ultra sensitive bio-MEMS force sensors with large force measurement range

J. Rajagopalan, A. Tofangchi, M.T. A. Saif

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)
Original languageEnglish
Title of host publicationHighly linear, ultra sensitive bio-MEMS force sensors with large force measurement range
StatePublished - 2010
EventIEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) -
Duration: Jan 1 2010 → …

Conference

ConferenceIEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)
Period1/1/10 → …

Cite this

Rajagopalan, J., Tofangchi, A., & Saif, M. T. A. (2010). Highly linear, ultra sensitive bio-MEMS force sensors with large force measurement range. In Highly linear, ultra sensitive bio-MEMS force sensors with large force measurement range

Highly linear, ultra sensitive bio-MEMS force sensors with large force measurement range. / Rajagopalan, J.; Tofangchi, A.; Saif, M.T. A.

Highly linear, ultra sensitive bio-MEMS force sensors with large force measurement range. 2010.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Rajagopalan, J, Tofangchi, A & Saif, MTA 2010, Highly linear, ultra sensitive bio-MEMS force sensors with large force measurement range. in Highly linear, ultra sensitive bio-MEMS force sensors with large force measurement range. IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), 1/1/10.
Rajagopalan J, Tofangchi A, Saif MTA. Highly linear, ultra sensitive bio-MEMS force sensors with large force measurement range. In Highly linear, ultra sensitive bio-MEMS force sensors with large force measurement range. 2010
Rajagopalan, J. ; Tofangchi, A. ; Saif, M.T. A. / Highly linear, ultra sensitive bio-MEMS force sensors with large force measurement range. Highly linear, ultra sensitive bio-MEMS force sensors with large force measurement range. 2010.
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M3 - Conference contribution

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