Highly linear, ultra sensitive bio-MEMS force sensors with large force measurement range

J. Rajagopalan, A. Tofangchi, M.T. A. Saif

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations
Original languageEnglish
Title of host publicationHighly linear, ultra sensitive bio-MEMS force sensors with large force measurement range
StatePublished - 2010
EventIEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) -
Duration: Jan 1 2010 → …

Conference

ConferenceIEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)
Period1/1/10 → …

Cite this

Rajagopalan, J., Tofangchi, A., & Saif, M. T. A. (2010). Highly linear, ultra sensitive bio-MEMS force sensors with large force measurement range. In Highly linear, ultra sensitive bio-MEMS force sensors with large force measurement range