Highly automated electron energy-loss spectroscopy elemental quantification

Raman D. Narayan; J. K. Weiss; Peter Rez

doi:10.1017/S1431927614000567

Highly automated electron energy-loss spectroscopy elemental quantification

Raman D. Narayan, J. K. Weiss, Peter Rez

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

A model-based fitting algorithm for electron energy-loss spectroscopy spectra is introduced, along with an intuitive user-interface. As with Verbeeck & Van Aert, the measured spectrum, rather than the single scattering distribution, is fit over a wide range. An approximation is developed that allows for accurate modeling while maintaining linearity in the parameters that represent elemental composition. Also, a method is given for generating a model for the low-loss background that incorporates plural scattering. Operation of the user-interface is described to demonstrate the ease of use that allows even nonexpert users to quickly obtain elemental analysis results.

Original language	English (US)
Pages (from-to)	798-806
Number of pages	9
Journal	Microscopy and Microanalysis
Volume	20
Issue number	3
DOIs	https://doi.org/10.1017/S1431927614000567
State	Published - Jun 2014

Keywords

EELS
fitting
model
multiple scattering
plural scattering
quantification

ASJC Scopus subject areas

Instrumentation

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10.1017/S1431927614000567

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AB - A model-based fitting algorithm for electron energy-loss spectroscopy spectra is introduced, along with an intuitive user-interface. As with Verbeeck & Van Aert, the measured spectrum, rather than the single scattering distribution, is fit over a wide range. An approximation is developed that allows for accurate modeling while maintaining linearity in the parameters that represent elemental composition. Also, a method is given for generating a model for the low-loss background that incorporates plural scattering. Operation of the user-interface is described to demonstrate the ease of use that allows even nonexpert users to quickly obtain elemental analysis results.

KW - EELS

KW - fitting

KW - model

KW - multiple scattering

KW - plural scattering

KW - quantification

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Highly automated electron energy-loss spectroscopy elemental quantification

Abstract

Keywords

ASJC Scopus subject areas

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