Highly (111)-oriented and conformal iridium films by liquid source metalorganic chemical vapor deposition

Jaydeb Goswami, Chang Gong Wang, Prashant Majhi, Yong Wook Shin, Sandwip Dey

Research output: Contribution to journalArticlepeer-review

30 Scopus citations

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds