Highly (111)-oriented and conformal iridium films by liquid source metalorganic chemical vapor deposition

Jaydeb Goswami, Chang Gong Wang, Prashant Majhi, Yong Wook Shin, Sandwip Dey

Research output: Contribution to journalArticlepeer-review

28 Scopus citations

Fingerprint

Dive into the research topics of 'Highly (111)-oriented and conformal iridium films by liquid source metalorganic chemical vapor deposition'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy