High-Transconductance P-Channel Algaas/Gaas Hfet's with Low-Energy Beryllium and Fluorine Co-Implantation Self-Alignment

Richard A. Kiehl, P. E. Hallali, J. Yates, Mike A. Tischler, R. M. Potemski, F. Cardone

Research output: Contribution to journal › Article › peer-review