High-tone bulk acoustic resonator integrated with surface micromachined FBAR filter on a single chip

Wei Pang, Hao Zhang, Jong Jin Kim, Hongyu Yu, Eun Sok Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

This paper describes a novel high-tone bulk acoustic resonator (HBAR) integrated with a surface micromachined FBAR (film bulk acoustic resonator) filter on sapphire substrate. The single-mode HBAR exhibited a loaded quality factor (Q loaded) of 3,580 at 2.5 GHz with a total size (including the contact pads) of 0.8×0.4×0.4mm 3. The integrated narrow band FBAR filter provides adequate suppression (>4dB) of the unwanted modes in the HBAR. This high Q and small size resonator is ideally suited for Pierce oscillator for voltage controlled oscillator (VCO) above 2 GHz.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages2057-2060
Number of pages4
StatePublished - 2005
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: Jun 5 2005Jun 9 2005

Publication series

NameDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume2

Other

Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
CountryKorea, Republic of
CitySeoul
Period6/5/056/9/05

Keywords

  • FBAR filter
  • HBAR
  • Microwave oscillators
  • Surface micromaching
  • XeF dry etching

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Pang, W., Zhang, H., Kim, J. J., Yu, H., & Kim, E. S. (2005). High-tone bulk acoustic resonator integrated with surface micromachined FBAR filter on a single chip. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 2057-2060). [4C2.1] (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 2).