@inproceedings{453a052374934a70bc1c9d61165d282f,
title = "High-tone bulk acoustic resonator integrated with surface micromachined FBAR filter on a single chip",
abstract = "This paper describes a novel high-tone bulk acoustic resonator (HBAR) integrated with a surface micromachined FBAR (film bulk acoustic resonator) filter on sapphire substrate. The single-mode HBAR exhibited a loaded quality factor (Q loaded) of 3,580 at 2.5 GHz with a total size (including the contact pads) of 0.8×0.4×0.4mm 3. The integrated narrow band FBAR filter provides adequate suppression (>4dB) of the unwanted modes in the HBAR. This high Q and small size resonator is ideally suited for Pierce oscillator for voltage controlled oscillator (VCO) above 2 GHz.",
keywords = "FBAR filter, HBAR, Microwave oscillators, Surface micromaching, XeF dry etching",
author = "Wei Pang and Hao Zhang and Kim, {Jong Jin} and Hongyu Yu and Kim, {Eun Sok}",
year = "2005",
language = "English (US)",
isbn = "0780389948",
series = "Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05",
pages = "2057--2060",
booktitle = "TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers",
note = "13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 ; Conference date: 05-06-2005 Through 09-06-2005",
}