High-tone bulk acoustic resonator integrated with surface micromachined FBAR filter on a single chip

Wei Pang, Hao Zhang, Jong Jin Kim, Hongyu Yu, Eun Sok Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

This paper describes a novel high-tone bulk acoustic resonator (HBAR) integrated with a surface micromachined FBAR (film bulk acoustic resonator) filter on sapphire substrate. The single-mode HBAR exhibited a loaded quality factor (Q loaded) of 3,580 at 2.5 GHz with a total size (including the contact pads) of 0.8×0.4×0.4mm 3. The integrated narrow band FBAR filter provides adequate suppression (>4dB) of the unwanted modes in the HBAR. This high Q and small size resonator is ideally suited for Pierce oscillator for voltage controlled oscillator (VCO) above 2 GHz.

Original languageEnglish (US)
Title of host publicationDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Pages2057-2060
Number of pages4
Volume2
StatePublished - 2005
Externally publishedYes
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: Jun 5 2005Jun 9 2005

Other

Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
CountryKorea, Republic of
CitySeoul
Period6/5/056/9/05

Fingerprint

Acoustic resonators
Variable frequency oscillators
Sapphire
Resonators
Substrates

Keywords

  • FBAR filter
  • HBAR
  • Microwave oscillators
  • Surface micromaching
  • XeF dry etching

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Pang, W., Zhang, H., Kim, J. J., Yu, H., & Kim, E. S. (2005). High-tone bulk acoustic resonator integrated with surface micromachined FBAR filter on a single chip. In Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05 (Vol. 2, pp. 2057-2060). [4C2.1]

High-tone bulk acoustic resonator integrated with surface micromachined FBAR filter on a single chip. / Pang, Wei; Zhang, Hao; Kim, Jong Jin; Yu, Hongyu; Kim, Eun Sok.

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05. Vol. 2 2005. p. 2057-2060 4C2.1.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Pang, W, Zhang, H, Kim, JJ, Yu, H & Kim, ES 2005, High-tone bulk acoustic resonator integrated with surface micromachined FBAR filter on a single chip. in Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05. vol. 2, 4C2.1, pp. 2057-2060, 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05, Seoul, Korea, Republic of, 6/5/05.
Pang W, Zhang H, Kim JJ, Yu H, Kim ES. High-tone bulk acoustic resonator integrated with surface micromachined FBAR filter on a single chip. In Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05. Vol. 2. 2005. p. 2057-2060. 4C2.1
Pang, Wei ; Zhang, Hao ; Kim, Jong Jin ; Yu, Hongyu ; Kim, Eun Sok. / High-tone bulk acoustic resonator integrated with surface micromachined FBAR filter on a single chip. Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05. Vol. 2 2005. pp. 2057-2060
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