High-tech equipment simulation

John Robertson, Sivakumar Venkatanarayanan

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    Tools used to fabricate integrated circuits have now reached a level of cost and complexity that are far beyond the capacity of an academic group to acquire or (even if donated) to support adequately. Simulation is an obvious but underused way to provide a broad and realistic environment to demonstrate how the tools work. This paper describes simulation of an ion implanter and simulations for other tools are being developed using the same principles. The control computer emulates all the typical features of a real machine (physical set-up, calibration and operation). In addition, typical faults in the tool can also be introduced. The tool simulator can also be linked to conventional process simulators for virtual lab activities at several course levels.

    Original languageEnglish (US)
    Title of host publicationASEE Annual Conference Proceedings
    Pages2799-2806
    Number of pages8
    StatePublished - 2003
    Event2003 ASEE Annual Conference and Exposition: Staying in Tune with Engineering Education - Nashville, TN, United States
    Duration: Jun 22 2003Jun 25 2003

    Other

    Other2003 ASEE Annual Conference and Exposition: Staying in Tune with Engineering Education
    CountryUnited States
    CityNashville, TN
    Period6/22/036/25/03

    Fingerprint

    Simulators
    Computer control
    Integrated circuits
    Calibration
    Ions
    Costs

    ASJC Scopus subject areas

    • Engineering(all)

    Cite this

    Robertson, J., & Venkatanarayanan, S. (2003). High-tech equipment simulation. In ASEE Annual Conference Proceedings (pp. 2799-2806)

    High-tech equipment simulation. / Robertson, John; Venkatanarayanan, Sivakumar.

    ASEE Annual Conference Proceedings. 2003. p. 2799-2806.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Robertson, J & Venkatanarayanan, S 2003, High-tech equipment simulation. in ASEE Annual Conference Proceedings. pp. 2799-2806, 2003 ASEE Annual Conference and Exposition: Staying in Tune with Engineering Education, Nashville, TN, United States, 6/22/03.
    Robertson J, Venkatanarayanan S. High-tech equipment simulation. In ASEE Annual Conference Proceedings. 2003. p. 2799-2806
    Robertson, John ; Venkatanarayanan, Sivakumar. / High-tech equipment simulation. ASEE Annual Conference Proceedings. 2003. pp. 2799-2806
    @inproceedings{e41d743e14a54567a5cce2e7fd728029,
    title = "High-tech equipment simulation",
    abstract = "Tools used to fabricate integrated circuits have now reached a level of cost and complexity that are far beyond the capacity of an academic group to acquire or (even if donated) to support adequately. Simulation is an obvious but underused way to provide a broad and realistic environment to demonstrate how the tools work. This paper describes simulation of an ion implanter and simulations for other tools are being developed using the same principles. The control computer emulates all the typical features of a real machine (physical set-up, calibration and operation). In addition, typical faults in the tool can also be introduced. The tool simulator can also be linked to conventional process simulators for virtual lab activities at several course levels.",
    author = "John Robertson and Sivakumar Venkatanarayanan",
    year = "2003",
    language = "English (US)",
    pages = "2799--2806",
    booktitle = "ASEE Annual Conference Proceedings",

    }

    TY - GEN

    T1 - High-tech equipment simulation

    AU - Robertson, John

    AU - Venkatanarayanan, Sivakumar

    PY - 2003

    Y1 - 2003

    N2 - Tools used to fabricate integrated circuits have now reached a level of cost and complexity that are far beyond the capacity of an academic group to acquire or (even if donated) to support adequately. Simulation is an obvious but underused way to provide a broad and realistic environment to demonstrate how the tools work. This paper describes simulation of an ion implanter and simulations for other tools are being developed using the same principles. The control computer emulates all the typical features of a real machine (physical set-up, calibration and operation). In addition, typical faults in the tool can also be introduced. The tool simulator can also be linked to conventional process simulators for virtual lab activities at several course levels.

    AB - Tools used to fabricate integrated circuits have now reached a level of cost and complexity that are far beyond the capacity of an academic group to acquire or (even if donated) to support adequately. Simulation is an obvious but underused way to provide a broad and realistic environment to demonstrate how the tools work. This paper describes simulation of an ion implanter and simulations for other tools are being developed using the same principles. The control computer emulates all the typical features of a real machine (physical set-up, calibration and operation). In addition, typical faults in the tool can also be introduced. The tool simulator can also be linked to conventional process simulators for virtual lab activities at several course levels.

    UR - http://www.scopus.com/inward/record.url?scp=8744293039&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=8744293039&partnerID=8YFLogxK

    M3 - Conference contribution

    SP - 2799

    EP - 2806

    BT - ASEE Annual Conference Proceedings

    ER -