High-tech equipment simulation

Tools used to fabricate integrated circuits have now reached a level of cost and complexity that are far beyond the capacity of an academic group to acquire or (even if donated) to support adequately. Simulation is an obvious but underused way to provide a broad and realistic environment to demonstrate how the tools work. This paper describes simulation of an ion implanter and simulations for other tools are being developed using the same principles. The control computer emulates all the typical features of a real machine (physical set-up, calibration and operation). In addition, typical faults in the tool can also be introduced. The tool simulator can also be linked to conventional process simulators for virtual lab activities at several course levels.