High spatial resolution studies of surfaces and small particles using electron beam techniques

J. A. Venables, J. Liu

Research output: Contribution to journalArticle

6 Scopus citations


A brief review is given of studies of surfaces and small particles using electron beam techniques. The principal tools are secondary, Auger and backscattered electrons, either energy-filtered using various types of analyzers, or as a stronger signal with coarser energy filtering. These tools have been deployed in wide-beam surface science instruments, but also increasingly in scanning electron and scanning transmission electron microscopes, especially in ultra-high vacuum instruments capable of analyzing clean surfaces. The different choices that need to be made are illustrated with examples of clean surfaces, thin films and catalyst particles at high spatial resolution.

Original languageEnglish (US)
Pages (from-to)205-218
Number of pages14
JournalJournal of Electron Spectroscopy and Related Phenomena
Issue number2-3 SPEC. ISS.
StatePublished - May 2005
Externally publishedYes



  • Auger electrons
  • Backscattered electrons
  • Secondary electrons
  • Small particle catalysts
  • Surfaces
  • UHV electron microscopy

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Radiation
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Spectroscopy
  • Physical and Theoretical Chemistry

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