High spatial resolution studies of surfaces and small particles using electron beam techniques

J. A. Venables; J. Liu

doi:10.1016/j.elspec.2004.05.008

High spatial resolution studies of surfaces and small particles using electron beam techniques

J. A. Venables, J. Liu

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

A brief review is given of studies of surfaces and small particles using electron beam techniques. The principal tools are secondary, Auger and backscattered electrons, either energy-filtered using various types of analyzers, or as a stronger signal with coarser energy filtering. These tools have been deployed in wide-beam surface science instruments, but also increasingly in scanning electron and scanning transmission electron microscopes, especially in ultra-high vacuum instruments capable of analyzing clean surfaces. The different choices that need to be made are illustrated with examples of clean surfaces, thin films and catalyst particles at high spatial resolution.

Original language	English (US)
Pages (from-to)	205-218
Number of pages	14
Journal	Journal of Electron Spectroscopy and Related Phenomena
Volume	143
Issue number	2-3 SPEC. ISS.
DOIs	https://doi.org/10.1016/j.elspec.2004.05.008
State	Published - May 2005
Externally published	Yes

Keywords

Auger electrons
Backscattered electrons
Secondary electrons
Small particle catalysts
Surfaces
UHV electron microscopy

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Radiation
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Spectroscopy
Physical and Theoretical Chemistry

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10.1016/j.elspec.2004.05.008

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abstract = "A brief review is given of studies of surfaces and small particles using electron beam techniques. The principal tools are secondary, Auger and backscattered electrons, either energy-filtered using various types of analyzers, or as a stronger signal with coarser energy filtering. These tools have been deployed in wide-beam surface science instruments, but also increasingly in scanning electron and scanning transmission electron microscopes, especially in ultra-high vacuum instruments capable of analyzing clean surfaces. The different choices that need to be made are illustrated with examples of clean surfaces, thin films and catalyst particles at high spatial resolution.",

keywords = "Auger electrons, Backscattered electrons, Secondary electrons, Small particle catalysts, Surfaces, UHV electron microscopy",

author = "Venables, {J. A.} and J. Liu",

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AU - Venables, J. A.

AU - Liu, J.

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AB - A brief review is given of studies of surfaces and small particles using electron beam techniques. The principal tools are secondary, Auger and backscattered electrons, either energy-filtered using various types of analyzers, or as a stronger signal with coarser energy filtering. These tools have been deployed in wide-beam surface science instruments, but also increasingly in scanning electron and scanning transmission electron microscopes, especially in ultra-high vacuum instruments capable of analyzing clean surfaces. The different choices that need to be made are illustrated with examples of clean surfaces, thin films and catalyst particles at high spatial resolution.

KW - Auger electrons

KW - Backscattered electrons

KW - Secondary electrons

KW - Small particle catalysts

KW - Surfaces

KW - UHV electron microscopy

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JO - Journal of Electron Spectroscopy and Related Phenomena

JF - Journal of Electron Spectroscopy and Related Phenomena

IS - 2-3 SPEC. ISS.

ER -

High spatial resolution studies of surfaces and small particles using electron beam techniques

Abstract

Keywords

ASJC Scopus subject areas

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