High spatial resolution studies of surfaces and small particles using electron beam techniques

J. A. Venables, Jingyue Liu

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

A brief review is given of studies of surfaces and small particles using electron beam techniques. The principal tools are secondary, Auger and backscattered electrons, either energy-filtered using various types of analyzers, or as a stronger signal with coarser energy filtering. These tools have been deployed in wide-beam surface science instruments, but also increasingly in scanning electron and scanning transmission electron microscopes, especially in ultra-high vacuum instruments capable of analyzing clean surfaces. The different choices that need to be made are illustrated with examples of clean surfaces, thin films and catalyst particles at high spatial resolution.

Original languageEnglish (US)
Pages (from-to)205-218
Number of pages14
JournalJournal of Electron Spectroscopy and Related Phenomena
Volume143
Issue number2-3 SPEC. ISS.
DOIs
StatePublished - May 2005
Externally publishedYes

Fingerprint

particle beams
Electron beams
spatial resolution
electron beams
high resolution
Scanning
scanning
Electrons
Ultrahigh vacuum
ultrahigh vacuum
analyzers
Electron microscopes
electron microscopes
electron energy
catalysts
Thin films
Catalysts
thin films
electrons
energy

Keywords

  • Auger electrons
  • Backscattered electrons
  • Secondary electrons
  • Small particle catalysts
  • Surfaces
  • UHV electron microscopy

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Spectroscopy
  • Atomic and Molecular Physics, and Optics
  • Surfaces and Interfaces

Cite this

High spatial resolution studies of surfaces and small particles using electron beam techniques. / Venables, J. A.; Liu, Jingyue.

In: Journal of Electron Spectroscopy and Related Phenomena, Vol. 143, No. 2-3 SPEC. ISS., 05.2005, p. 205-218.

Research output: Contribution to journalArticle

@article{2c7787b021a9447e9493ab40defb0452,
title = "High spatial resolution studies of surfaces and small particles using electron beam techniques",
abstract = "A brief review is given of studies of surfaces and small particles using electron beam techniques. The principal tools are secondary, Auger and backscattered electrons, either energy-filtered using various types of analyzers, or as a stronger signal with coarser energy filtering. These tools have been deployed in wide-beam surface science instruments, but also increasingly in scanning electron and scanning transmission electron microscopes, especially in ultra-high vacuum instruments capable of analyzing clean surfaces. The different choices that need to be made are illustrated with examples of clean surfaces, thin films and catalyst particles at high spatial resolution.",
keywords = "Auger electrons, Backscattered electrons, Secondary electrons, Small particle catalysts, Surfaces, UHV electron microscopy",
author = "Venables, {J. A.} and Jingyue Liu",
year = "2005",
month = "5",
doi = "10.1016/j.elspec.2004.05.008",
language = "English (US)",
volume = "143",
pages = "205--218",
journal = "Journal of Electron Spectroscopy and Related Phenomena",
issn = "0368-2048",
publisher = "Elsevier",
number = "2-3 SPEC. ISS.",

}

TY - JOUR

T1 - High spatial resolution studies of surfaces and small particles using electron beam techniques

AU - Venables, J. A.

AU - Liu, Jingyue

PY - 2005/5

Y1 - 2005/5

N2 - A brief review is given of studies of surfaces and small particles using electron beam techniques. The principal tools are secondary, Auger and backscattered electrons, either energy-filtered using various types of analyzers, or as a stronger signal with coarser energy filtering. These tools have been deployed in wide-beam surface science instruments, but also increasingly in scanning electron and scanning transmission electron microscopes, especially in ultra-high vacuum instruments capable of analyzing clean surfaces. The different choices that need to be made are illustrated with examples of clean surfaces, thin films and catalyst particles at high spatial resolution.

AB - A brief review is given of studies of surfaces and small particles using electron beam techniques. The principal tools are secondary, Auger and backscattered electrons, either energy-filtered using various types of analyzers, or as a stronger signal with coarser energy filtering. These tools have been deployed in wide-beam surface science instruments, but also increasingly in scanning electron and scanning transmission electron microscopes, especially in ultra-high vacuum instruments capable of analyzing clean surfaces. The different choices that need to be made are illustrated with examples of clean surfaces, thin films and catalyst particles at high spatial resolution.

KW - Auger electrons

KW - Backscattered electrons

KW - Secondary electrons

KW - Small particle catalysts

KW - Surfaces

KW - UHV electron microscopy

UR - http://www.scopus.com/inward/record.url?scp=14544283279&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=14544283279&partnerID=8YFLogxK

U2 - 10.1016/j.elspec.2004.05.008

DO - 10.1016/j.elspec.2004.05.008

M3 - Article

VL - 143

SP - 205

EP - 218

JO - Journal of Electron Spectroscopy and Related Phenomena

JF - Journal of Electron Spectroscopy and Related Phenomena

SN - 0368-2048

IS - 2-3 SPEC. ISS.

ER -