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High Resolution, Multi-layer Resistance for Microlithography and Method
Michael Kozicki
(Inventor)
Arizona State University
Research output
:
Patent
Overview
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Dive into the research topics of 'High Resolution, Multi-layer Resistance for Microlithography and Method'. Together they form a unique fingerprint.
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Engineering & Materials Science
Lithography
100%
Arsenic
90%
Photoresists
77%
Sulfides
70%
Silver
66%
Optics
63%
Integrated circuit manufacture
56%
Networks (circuits)
50%
Light sources
33%
Lenses
31%
Multilayers
29%
Wavelength
26%
Coatings
22%
Geometry
18%