@inproceedings{9dd4a4075f114c40b41833fd39e8435c,
title = "HIGH RESOLUTION ELECTRON MICROSCOPY OF Si-IMPLANTED AND ELECTRON-BEAM ANNEALED SILICON-ON-SAPPHIRE.",
author = "Smith, {David J.} and Freeman, {L. A.} and McMahon, {R. A.} and H. Ahmed and Pitt, {M. G.} and Peters, {T. B.}",
year = "1983",
language = "English (US)",
isbn = "0854981586",
series = "Institute of Physics Conference Series",
publisher = "Inst of Physics",
number = "67",
pages = "83--88",
booktitle = "Institute of Physics Conference Series",
edition = "67",
}