HIGH RESOLUTION ELECTRON MICROSCOPY OF Si-IMPLANTED AND ELECTRON-BEAM ANNEALED SILICON-ON-SAPPHIRE.

David Smith, L. A. Freeman, R. A. McMahon, H. Ahmed, M. G. Pitt, T. B. Peters

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)
Original languageEnglish (US)
Title of host publicationInstitute of Physics Conference Series
Place of PublicationBristol, Engl
PublisherInst of Physics
Pages83-88
Number of pages6
Edition67
ISBN (Print)0854981586
StatePublished - 1983
Externally publishedYes

Fingerprint

electron microscopy
sapphire
electron beams
high resolution
silicon

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Smith, D., Freeman, L. A., McMahon, R. A., Ahmed, H., Pitt, M. G., & Peters, T. B. (1983). HIGH RESOLUTION ELECTRON MICROSCOPY OF Si-IMPLANTED AND ELECTRON-BEAM ANNEALED SILICON-ON-SAPPHIRE. In Institute of Physics Conference Series (67 ed., pp. 83-88). Bristol, Engl: Inst of Physics.

HIGH RESOLUTION ELECTRON MICROSCOPY OF Si-IMPLANTED AND ELECTRON-BEAM ANNEALED SILICON-ON-SAPPHIRE. / Smith, David; Freeman, L. A.; McMahon, R. A.; Ahmed, H.; Pitt, M. G.; Peters, T. B.

Institute of Physics Conference Series. 67. ed. Bristol, Engl : Inst of Physics, 1983. p. 83-88.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Smith, D, Freeman, LA, McMahon, RA, Ahmed, H, Pitt, MG & Peters, TB 1983, HIGH RESOLUTION ELECTRON MICROSCOPY OF Si-IMPLANTED AND ELECTRON-BEAM ANNEALED SILICON-ON-SAPPHIRE. in Institute of Physics Conference Series. 67 edn, Inst of Physics, Bristol, Engl, pp. 83-88.
Smith D, Freeman LA, McMahon RA, Ahmed H, Pitt MG, Peters TB. HIGH RESOLUTION ELECTRON MICROSCOPY OF Si-IMPLANTED AND ELECTRON-BEAM ANNEALED SILICON-ON-SAPPHIRE. In Institute of Physics Conference Series. 67 ed. Bristol, Engl: Inst of Physics. 1983. p. 83-88
Smith, David ; Freeman, L. A. ; McMahon, R. A. ; Ahmed, H. ; Pitt, M. G. ; Peters, T. B. / HIGH RESOLUTION ELECTRON MICROSCOPY OF Si-IMPLANTED AND ELECTRON-BEAM ANNEALED SILICON-ON-SAPPHIRE. Institute of Physics Conference Series. 67. ed. Bristol, Engl : Inst of Physics, 1983. pp. 83-88
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