High resolution analytical electron microscopy

In analytical electron microscopy energy dispersive X-ray spectroscopy and electron energy loss spectroscopy are used to determine the local composition of specimen areas whose structure is determined by electron imaging and diffraction. In this paper an introduction to the spectroscopy methods for local composition determination is given, and illustrated with some applications from structural ceramics research. The imaging and diffraction performance to be expected from analytical electron microscope, particularly the convergent beam capability, is discussed and illustrated with results from silicon research.