Abstract

In analytical electron microscopy energy dispersive X-ray spectroscopy and electron energy loss spectroscopy are used to determine the local composition of specimen areas whose structure is determined by electron imaging and diffraction. In this paper an introduction to the spectroscopy methods for local composition determination is given, and illustrated with some applications from structural ceramics research. The imaging and diffraction performance to be expected from analytical electron microscope, particularly the convergent beam capability, is discussed and illustrated with results from silicon research.

Original languageEnglish (US)
Pages (from-to)79-93
Number of pages15
JournalUltramicroscopy
Volume8
Issue number1-2
DOIs
StatePublished - 1982

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation

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