High Q single-mode high-tone bulk acoustic resonator integrated with surface-micromachined FBAR filter

Wei Pang, Hao Zhang, Jong Jin Kim, Hongyu Yu, Eun Sok Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations

Abstract

This paper describes a novel high-tone bulk acoustic resonator (HEAR) integrated with a surface micromachined FBAR (film bulk acoustic resonator) filter on sapphire substrate. The single-mode HBAR exhibited a quality factor (Q) of 3,580 at 2.5 GHz with total size (including the contact pads) of 0.8×0.4×0.4mm 3. The integrated narrow band FBAR filter provides adequate suppression (>4dB) of the unwanted modes in the HBAR. This high Q and small size resonator is ideally suited for Pierce oscillator for voltage controlled oscillator (VCO) above 2 GHz.

Original languageEnglish (US)
Title of host publication2005 IEEE MTT-S International Microwave Symposium Digest
Pages413-416
Number of pages4
DOIs
StatePublished - 2005
Event2005 IEEE MTT-S International Microwave Symposium - Long Beach, CA, United States
Duration: Jun 12 2005Jun 17 2005

Publication series

NameIEEE MTT-S International Microwave Symposium Digest
Volume2005
ISSN (Print)0149-645X

Other

Other2005 IEEE MTT-S International Microwave Symposium
CountryUnited States
CityLong Beach, CA
Period6/12/056/17/05

Keywords

  • FBAR filter
  • HBAR
  • Microwave oscillators
  • Surface micromaching
  • Xef dry etching

ASJC Scopus subject areas

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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  • Cite this

    Pang, W., Zhang, H., Kim, J. J., Yu, H., & Kim, E. S. (2005). High Q single-mode high-tone bulk acoustic resonator integrated with surface-micromachined FBAR filter. In 2005 IEEE MTT-S International Microwave Symposium Digest (pp. 413-416). [1516616] (IEEE MTT-S International Microwave Symposium Digest; Vol. 2005). https://doi.org/10.1109/MWSYM.2005.1516616