@inproceedings{f205e0f9d3064b13a186192852647136,
title = "High Q single-mode high-tone bulk acoustic resonator integrated with surface-micromachined FBAR filter",
abstract = "This paper describes a novel high-tone bulk acoustic resonator (HEAR) integrated with a surface micromachined FBAR (film bulk acoustic resonator) filter on sapphire substrate. The single-mode HBAR exhibited a quality factor (Q) of 3,580 at 2.5 GHz with total size (including the contact pads) of 0.8×0.4×0.4mm 3. The integrated narrow band FBAR filter provides adequate suppression (>4dB) of the unwanted modes in the HBAR. This high Q and small size resonator is ideally suited for Pierce oscillator for voltage controlled oscillator (VCO) above 2 GHz.",
keywords = "FBAR filter, HBAR, Microwave oscillators, Surface micromaching, Xef dry etching",
author = "Wei Pang and Hao Zhang and Kim, {Jong Jin} and Hongyu Yu and Kim, {Eun Sok}",
year = "2005",
doi = "10.1109/MWSYM.2005.1516616",
language = "English (US)",
isbn = "0780388461",
series = "IEEE MTT-S International Microwave Symposium Digest",
pages = "413--416",
booktitle = "2005 IEEE MTT-S International Microwave Symposium Digest",
note = "2005 IEEE MTT-S International Microwave Symposium ; Conference date: 12-06-2005 Through 17-06-2005",
}