Abstract
This paper describes a novel high-tone bulk acoustic resonator (HEAR) integrated with a surface micromachined FBAR (film bulk acoustic resonator) filter on sapphire substrate. The single-mode HBAR exhibited a quality factor (Q) of 3,580 at 2.5 GHz with total size (including the contact pads) of 0.8×0.4×0.4mm 3. The integrated narrow band FBAR filter provides adequate suppression (>4dB) of the unwanted modes in the HBAR. This high Q and small size resonator is ideally suited for Pierce oscillator for voltage controlled oscillator (VCO) above 2 GHz.
| Original language | English (US) |
|---|---|
| Title of host publication | 2005 IEEE MTT-S International Microwave Symposium Digest |
| Pages | 413-416 |
| Number of pages | 4 |
| DOIs | |
| State | Published - 2005 |
| Event | 2005 IEEE MTT-S International Microwave Symposium - Long Beach, CA, United States Duration: Jun 12 2005 → Jun 17 2005 |
Publication series
| Name | IEEE MTT-S International Microwave Symposium Digest |
|---|---|
| Volume | 2005 |
| ISSN (Print) | 0149-645X |
Other
| Other | 2005 IEEE MTT-S International Microwave Symposium |
|---|---|
| Country | United States |
| City | Long Beach, CA |
| Period | 6/12/05 → 6/17/05 |
Keywords
- FBAR filter
- HBAR
- Microwave oscillators
- Surface micromaching
- Xef dry etching
ASJC Scopus subject areas
- Radiation
- Condensed Matter Physics
- Electrical and Electronic Engineering
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Cite this
Pang, W., Zhang, H., Kim, J. J., Yu, H., & Kim, E. S. (2005). High Q single-mode high-tone bulk acoustic resonator integrated with surface-micromachined FBAR filter. In 2005 IEEE MTT-S International Microwave Symposium Digest (pp. 413-416). [1516616] (IEEE MTT-S International Microwave Symposium Digest; Vol. 2005). https://doi.org/10.1109/MWSYM.2005.1516616