High Q single-mode high-tone bulk acoustic resonator integrated with surface-micromachined FBAR filter

Wei Pang, Hao Zhang, Jong Jin Kim, Hongyu Yu, Eun Sok Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

This paper describes a novel high-tone bulk acoustic resonator (HEAR) integrated with a surface micromachined FBAR (film bulk acoustic resonator) filter on sapphire substrate. The single-mode HBAR exhibited a quality factor (Q) of 3,580 at 2.5 GHz with total size (including the contact pads) of 0.8×0.4×0.4mm 3. The integrated narrow band FBAR filter provides adequate suppression (>4dB) of the unwanted modes in the HBAR. This high Q and small size resonator is ideally suited for Pierce oscillator for voltage controlled oscillator (VCO) above 2 GHz.

Original languageEnglish (US)
Title of host publicationIEEE MTT-S International Microwave Symposium Digest
Pages413-416
Number of pages4
Volume2005
DOIs
StatePublished - 2005
Externally publishedYes
Event2005 IEEE MTT-S International Microwave Symposium - Long Beach, CA, United States
Duration: Jun 12 2005Jun 17 2005

Other

Other2005 IEEE MTT-S International Microwave Symposium
CountryUnited States
CityLong Beach, CA
Period6/12/056/17/05

Fingerprint

Acoustic resonators
Q factors
resonators
filters
acoustics
Variable frequency oscillators
Sapphire
voltage controlled oscillators
Resonators
narrowband
sapphire
oscillators
retarding
Substrates

Keywords

  • FBAR filter
  • HBAR
  • Microwave oscillators
  • Surface micromaching
  • Xef dry etching

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Pang, W., Zhang, H., Kim, J. J., Yu, H., & Kim, E. S. (2005). High Q single-mode high-tone bulk acoustic resonator integrated with surface-micromachined FBAR filter. In IEEE MTT-S International Microwave Symposium Digest (Vol. 2005, pp. 413-416). [1516616] https://doi.org/10.1109/MWSYM.2005.1516616

High Q single-mode high-tone bulk acoustic resonator integrated with surface-micromachined FBAR filter. / Pang, Wei; Zhang, Hao; Kim, Jong Jin; Yu, Hongyu; Kim, Eun Sok.

IEEE MTT-S International Microwave Symposium Digest. Vol. 2005 2005. p. 413-416 1516616.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Pang, W, Zhang, H, Kim, JJ, Yu, H & Kim, ES 2005, High Q single-mode high-tone bulk acoustic resonator integrated with surface-micromachined FBAR filter. in IEEE MTT-S International Microwave Symposium Digest. vol. 2005, 1516616, pp. 413-416, 2005 IEEE MTT-S International Microwave Symposium, Long Beach, CA, United States, 6/12/05. https://doi.org/10.1109/MWSYM.2005.1516616
Pang W, Zhang H, Kim JJ, Yu H, Kim ES. High Q single-mode high-tone bulk acoustic resonator integrated with surface-micromachined FBAR filter. In IEEE MTT-S International Microwave Symposium Digest. Vol. 2005. 2005. p. 413-416. 1516616 https://doi.org/10.1109/MWSYM.2005.1516616
Pang, Wei ; Zhang, Hao ; Kim, Jong Jin ; Yu, Hongyu ; Kim, Eun Sok. / High Q single-mode high-tone bulk acoustic resonator integrated with surface-micromachined FBAR filter. IEEE MTT-S International Microwave Symposium Digest. Vol. 2005 2005. pp. 413-416
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