Abstract
This paper describes a novel high-tone bulk acoustic resonator (HEAR) integrated with a surface micromachined FBAR (film bulk acoustic resonator) filter on sapphire substrate. The single-mode HBAR exhibited a quality factor (Q) of 3,580 at 2.5 GHz with total size (including the contact pads) of 0.8×0.4×0.4mm 3. The integrated narrow band FBAR filter provides adequate suppression (>4dB) of the unwanted modes in the HBAR. This high Q and small size resonator is ideally suited for Pierce oscillator for voltage controlled oscillator (VCO) above 2 GHz.
| Original language | English (US) |
|---|---|
| Title of host publication | IEEE MTT-S International Microwave Symposium Digest |
| Pages | 413-416 |
| Number of pages | 4 |
| Volume | 2005 |
| DOIs | |
| State | Published - 2005 |
| Externally published | Yes |
| Event | 2005 IEEE MTT-S International Microwave Symposium - Long Beach, CA, United States Duration: Jun 12 2005 → Jun 17 2005 |
Other
| Other | 2005 IEEE MTT-S International Microwave Symposium |
|---|---|
| Country | United States |
| City | Long Beach, CA |
| Period | 6/12/05 → 6/17/05 |
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Keywords
- FBAR filter
- HBAR
- Microwave oscillators
- Surface micromaching
- Xef dry etching
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering
Cite this
High Q single-mode high-tone bulk acoustic resonator integrated with surface-micromachined FBAR filter. / Pang, Wei; Zhang, Hao; Kim, Jong Jin; Yu, Hongyu; Kim, Eun Sok.
IEEE MTT-S International Microwave Symposium Digest. Vol. 2005 2005. p. 413-416 1516616.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - High Q single-mode high-tone bulk acoustic resonator integrated with surface-micromachined FBAR filter
AU - Pang, Wei
AU - Zhang, Hao
AU - Kim, Jong Jin
AU - Yu, Hongyu
AU - Kim, Eun Sok
PY - 2005
Y1 - 2005
N2 - This paper describes a novel high-tone bulk acoustic resonator (HEAR) integrated with a surface micromachined FBAR (film bulk acoustic resonator) filter on sapphire substrate. The single-mode HBAR exhibited a quality factor (Q) of 3,580 at 2.5 GHz with total size (including the contact pads) of 0.8×0.4×0.4mm 3. The integrated narrow band FBAR filter provides adequate suppression (>4dB) of the unwanted modes in the HBAR. This high Q and small size resonator is ideally suited for Pierce oscillator for voltage controlled oscillator (VCO) above 2 GHz.
AB - This paper describes a novel high-tone bulk acoustic resonator (HEAR) integrated with a surface micromachined FBAR (film bulk acoustic resonator) filter on sapphire substrate. The single-mode HBAR exhibited a quality factor (Q) of 3,580 at 2.5 GHz with total size (including the contact pads) of 0.8×0.4×0.4mm 3. The integrated narrow band FBAR filter provides adequate suppression (>4dB) of the unwanted modes in the HBAR. This high Q and small size resonator is ideally suited for Pierce oscillator for voltage controlled oscillator (VCO) above 2 GHz.
KW - FBAR filter
KW - HBAR
KW - Microwave oscillators
KW - Surface micromaching
KW - Xef dry etching
UR - http://www.scopus.com/inward/record.url?scp=33749250418&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33749250418&partnerID=8YFLogxK
U2 - 10.1109/MWSYM.2005.1516616
DO - 10.1109/MWSYM.2005.1516616
M3 - Conference contribution
AN - SCOPUS:33749250418
SN - 0780388461
SN - 9780780388468
VL - 2005
SP - 413
EP - 416
BT - IEEE MTT-S International Microwave Symposium Digest
ER -