High-pressure phase transformation of silicon nitride

John Patten, Ronnie Fesperman, Satya Kumar, Sam McSpadden, Jun Qu, Michael Lance, Robert Nemanich, Jennifer Huening

Research output: Contribution to journalArticle

23 Scopus citations

Abstract

A high-pressure phase transformation (HPPT) in the ceramic material silicon nitride (SiN) was analyzed. The structure of the micro-and macromachined SiN was analyzed using a high-pressure diamond anvil cell, Raman spectroscopy, csanning/transmission electron microscopy, optical and acoustic microscope inspection. The HPPT exhibited a ductile or metallike behavior leading to severe plastic deformation. The results show that the pressure-induced plasticity was similar to that found in Si and germanium.

Original languageEnglish (US)
Pages (from-to)4740-4742
Number of pages3
JournalApplied Physics Letters
Volume83
Issue number23
DOIs
StatePublished - Dec 8 2003
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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    Patten, J., Fesperman, R., Kumar, S., McSpadden, S., Qu, J., Lance, M., Nemanich, R., & Huening, J. (2003). High-pressure phase transformation of silicon nitride. Applied Physics Letters, 83(23), 4740-4742. https://doi.org/10.1063/1.1632031