A high-pressure phase transformation (HPPT) in the ceramic material silicon nitride (SiN) was analyzed. The structure of the micro-and macromachined SiN was analyzed using a high-pressure diamond anvil cell, Raman spectroscopy, csanning/transmission electron microscopy, optical and acoustic microscope inspection. The HPPT exhibited a ductile or metallike behavior leading to severe plastic deformation. The results show that the pressure-induced plasticity was similar to that found in Si and germanium.
|Original language||English (US)|
|Number of pages||3|
|Journal||Applied Physics Letters|
|State||Published - Dec 8 2003|
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)