Abstract

This paper presents integrated inductors with Co-Zr-Ta-B (CZTB) thin films on flexible organic substrates for MHz-GHz applications. This paper demonstrated the fabrication and characterization of magnetic thin-film inductors on flexible organic substrates, such as polyimide and Ajinomoto build-up film thin films. These films have thicknesses of only tens of micrometer and thus are very flexible compared to the same inductor structures fabricated on rigid substrates, such as quartz. The magnetic films on flexible substrates were observed to maintain similar magnetic properties compared with those on Si substrate, but with greater coercivity likely due to the increased roughness of the substrate surface. The fabricated thin-film inductors on organic substrates with inductance L, measured by RF characteristics, have shown significantly increased inductance compared to air-core inductors (without magnetic core materials). This paper also demonstrated a high frequency response, clearly over GHz, consistent with the CZTB type of materials. The frequency response, as well as inductance and Q values, remains similar even after many iterations of bending to a large degree, indicating the robustness of the inductor on flexible organic substrates, as well as that of the magnetic thin films.

Original languageEnglish (US)
Article number7932163
JournalIEEE Transactions on Magnetics
Volume53
Issue number11
DOIs
StatePublished - Nov 1 2017

Fingerprint

Magnetic thin films
Substrates
Inductance
Thin films
Frequency response
Magnetic films
Magnetic cores
Quartz
Coercive force
Polyimides
Film thickness
Magnetic properties
Surface roughness
Fabrication

Keywords

  • High frequency
  • integrated inductors
  • magnetic thin film
  • organic substrates

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

High-Frequency Magnetic Thin-Film Inductor Integrated on Flexible Organic Substrates. / Wu, Hao; Khdour, Mahmoud; Apsangi, Priyanka; Yu, Hongbin.

In: IEEE Transactions on Magnetics, Vol. 53, No. 11, 7932163, 01.11.2017.

Research output: Contribution to journalArticle

@article{b97f78bf7adf47ae99ed38f1b1508fc8,
title = "High-Frequency Magnetic Thin-Film Inductor Integrated on Flexible Organic Substrates",
abstract = "This paper presents integrated inductors with Co-Zr-Ta-B (CZTB) thin films on flexible organic substrates for MHz-GHz applications. This paper demonstrated the fabrication and characterization of magnetic thin-film inductors on flexible organic substrates, such as polyimide and Ajinomoto build-up film thin films. These films have thicknesses of only tens of micrometer and thus are very flexible compared to the same inductor structures fabricated on rigid substrates, such as quartz. The magnetic films on flexible substrates were observed to maintain similar magnetic properties compared with those on Si substrate, but with greater coercivity likely due to the increased roughness of the substrate surface. The fabricated thin-film inductors on organic substrates with inductance L, measured by RF characteristics, have shown significantly increased inductance compared to air-core inductors (without magnetic core materials). This paper also demonstrated a high frequency response, clearly over GHz, consistent with the CZTB type of materials. The frequency response, as well as inductance and Q values, remains similar even after many iterations of bending to a large degree, indicating the robustness of the inductor on flexible organic substrates, as well as that of the magnetic thin films.",
keywords = "High frequency, integrated inductors, magnetic thin film, organic substrates",
author = "Hao Wu and Mahmoud Khdour and Priyanka Apsangi and Hongbin Yu",
year = "2017",
month = "11",
day = "1",
doi = "10.1109/TMAG.2017.2705046",
language = "English (US)",
volume = "53",
journal = "IEEE Transactions on Magnetics",
issn = "0018-9464",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "11",

}

TY - JOUR

T1 - High-Frequency Magnetic Thin-Film Inductor Integrated on Flexible Organic Substrates

AU - Wu, Hao

AU - Khdour, Mahmoud

AU - Apsangi, Priyanka

AU - Yu, Hongbin

PY - 2017/11/1

Y1 - 2017/11/1

N2 - This paper presents integrated inductors with Co-Zr-Ta-B (CZTB) thin films on flexible organic substrates for MHz-GHz applications. This paper demonstrated the fabrication and characterization of magnetic thin-film inductors on flexible organic substrates, such as polyimide and Ajinomoto build-up film thin films. These films have thicknesses of only tens of micrometer and thus are very flexible compared to the same inductor structures fabricated on rigid substrates, such as quartz. The magnetic films on flexible substrates were observed to maintain similar magnetic properties compared with those on Si substrate, but with greater coercivity likely due to the increased roughness of the substrate surface. The fabricated thin-film inductors on organic substrates with inductance L, measured by RF characteristics, have shown significantly increased inductance compared to air-core inductors (without magnetic core materials). This paper also demonstrated a high frequency response, clearly over GHz, consistent with the CZTB type of materials. The frequency response, as well as inductance and Q values, remains similar even after many iterations of bending to a large degree, indicating the robustness of the inductor on flexible organic substrates, as well as that of the magnetic thin films.

AB - This paper presents integrated inductors with Co-Zr-Ta-B (CZTB) thin films on flexible organic substrates for MHz-GHz applications. This paper demonstrated the fabrication and characterization of magnetic thin-film inductors on flexible organic substrates, such as polyimide and Ajinomoto build-up film thin films. These films have thicknesses of only tens of micrometer and thus are very flexible compared to the same inductor structures fabricated on rigid substrates, such as quartz. The magnetic films on flexible substrates were observed to maintain similar magnetic properties compared with those on Si substrate, but with greater coercivity likely due to the increased roughness of the substrate surface. The fabricated thin-film inductors on organic substrates with inductance L, measured by RF characteristics, have shown significantly increased inductance compared to air-core inductors (without magnetic core materials). This paper also demonstrated a high frequency response, clearly over GHz, consistent with the CZTB type of materials. The frequency response, as well as inductance and Q values, remains similar even after many iterations of bending to a large degree, indicating the robustness of the inductor on flexible organic substrates, as well as that of the magnetic thin films.

KW - High frequency

KW - integrated inductors

KW - magnetic thin film

KW - organic substrates

UR - http://www.scopus.com/inward/record.url?scp=85032954994&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85032954994&partnerID=8YFLogxK

U2 - 10.1109/TMAG.2017.2705046

DO - 10.1109/TMAG.2017.2705046

M3 - Article

VL - 53

JO - IEEE Transactions on Magnetics

JF - IEEE Transactions on Magnetics

SN - 0018-9464

IS - 11

M1 - 7932163

ER -