Harmonic operation of acoustic transducer for droplet ejection application

Chuang Yuan Lee, Hongyu Yu, Eun Sok Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

This paper reports the use of harmonic frequencies for acoustic ejection in order to eject micron-sized droplets. For an acoustic ejector working at the thickness-mode resonance, the droplet size is primarily determined by the acoustic wavelength, which is proportional to the piezoelectric substrate thickness. In the newly invented design, we do not lap the bulk piezoelectric PZT substrate or use PZT thin films, but use harmonic frequencies of the bulk form to reduce the wavelength. The acoustic ejectors utilizing harmonic frequencies have been fabricated and shown to be very effective up to the 9th harmonic (∼180 MHz), ejecting droplets as small as 10 μm in diameter.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages1283-1286
Number of pages4
DOIs
StatePublished - Dec 1 2007
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: Jun 10 2007Jun 14 2007

Publication series

NameTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
CountryFrance
CityLyon
Period6/10/076/14/07

Keywords

  • Acoustic ejector
  • Droplet
  • Harmonics

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Lee, C. Y., Yu, H., & Kim, E. S. (2007). Harmonic operation of acoustic transducer for droplet ejection application. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1283-1286). [4300372] (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2007.4300372