H-induced platelet and crack formation in hydrogenated epitaxial Si/Si 0.98B 0.02/Si structures

Lin Shao, Yuan Lin, J. G. Swadener, J. K. Lee, Q. X. Jia, Y. Q. Wang, M. Nastasi, Phillip E. Thompson, N. David Theodore, Terry Alford, J. W. Mayer, Peng Chen, S. S. Lau

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Physics & Astronomy