Guided three-dimensional catalyst folding during metal-assisted chemical etching of silicon

Konrad Rykaczewski, Owen J. Hildreth, Ching P. Wong, Andrei G. Fedorov, John Henry J Scott

Research output: Contribution to journalArticle

66 Citations (Scopus)

Abstract

In recent years metal-assisted chemical etching (MaCE) of silicon, in which etching is confined to a small region surrounding metal catalyst templates, has emerged as a promising low cost alternative to commonly used three-dimensional (3D) fabrication techniques. We report a new methodology for controllable folding of 2D metal catalyst films into 3D structures using MaCE. This method takes advantage of selective patterning of the catalyst layer into regions with mismatched characteristic dimensions, resulting in uneven etching rates along the notched boundary lines that produce hinged 2D templates for 3D folding. We explore the dynamics of the folding process of the hinged templates, demonstrating that the folding action combines rotational and translational motion of the catalyst template, which yields topologically complex 3D nanostructures with intimately integrated metal and silicon features.

Original languageEnglish (US)
Pages (from-to)2369-2374
Number of pages6
JournalNano Letters
Volume11
Issue number6
DOIs
StatePublished - Jun 8 2011
Externally publishedYes

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Silicon
folding
Etching
Metals
etching
catalysts
templates
Catalysts
silicon
metals
translational motion
Nanostructures
methodology
Fabrication
fabrication
Costs

Keywords

  • 3D nanofabrication
  • directed self-assembly
  • focused ion beam patterning
  • metal-assisted chemical etching

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanical Engineering

Cite this

Guided three-dimensional catalyst folding during metal-assisted chemical etching of silicon. / Rykaczewski, Konrad; Hildreth, Owen J.; Wong, Ching P.; Fedorov, Andrei G.; Scott, John Henry J.

In: Nano Letters, Vol. 11, No. 6, 08.06.2011, p. 2369-2374.

Research output: Contribution to journalArticle

Rykaczewski, Konrad ; Hildreth, Owen J. ; Wong, Ching P. ; Fedorov, Andrei G. ; Scott, John Henry J. / Guided three-dimensional catalyst folding during metal-assisted chemical etching of silicon. In: Nano Letters. 2011 ; Vol. 11, No. 6. pp. 2369-2374.
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