Guest Editorial Special Section - Papers from the 2019 MASM/WSC Conference

John W. Fowler, Lars Monch, Tae Eog Lee

Research output: Contribution to journalEditorialpeer-review

Original languageEnglish (US)
Article number9244298
Pages (from-to)493-495
Number of pages3
JournalIEEE Transactions on Semiconductor Manufacturing
Volume33
Issue number4
DOIs
StatePublished - Nov 2020
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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