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Growth of SiGeSn Thin Films Using Simplified PECVD Reactor towards NIR Sensor Devices
Jignesh Vanjaria, Arul Chakkaravarthi Arjunan, Thomas Salagaj, Gary S. Tompa, Haokai Yang, Todd Houghton, Hongbin Yu
Research output: Contribution to journal › Article › peer-review
2
Scopus
citations