Growth of resonant-cavity enhanced photodetectors by MBE with in situ feedback control using spectroscopic ellipsometry

M. Beaudoin, P. Kelkar, M. D. Boonzaayer, W. Braun, P. Dowd, Shane Johnson, U. Koelle, C. M. Ryu, Yong-Hang Zhang

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Precise control of layer thickness and alloy compositions are very critical for the successful growth of vertical cavity surface emitting lasers (VCSEL) and resonant cavity enhanced photodetectors (RCEPD). In traditional MBE, the growth of these devices requires extensive calibrations. Recently, spectroscopic ellipsometry (SE) was shown to be an accurate method for determining the composition and thicknesses of III-V semiconductor layers in situ during growth. This paper reports the growth of AlAs/GaAs/InGaAs RCEPDs using SE control with no a priori calibration curves. The experimentally measured cavity resonance of the reflectivity spectrum and the photoresponse peak of the fabricated photodiode lie within 3 nm of the target design value of 990 nm. These results show that feedback control during MBE allows quicker and more reproducible growth of RCEPDs with precise control of layer thickness and alloy composition than calibration-based control.

Original languageEnglish (US)
Pages (from-to)990-993
Number of pages4
JournalJournal of Crystal Growth
Volume201
DOIs
StatePublished - May 1999

Fingerprint

Cavity resonators
Spectroscopic ellipsometry
cavity resonators
Photodetectors
feedback control
Molecular beam epitaxy
ellipsometry
Feedback control
photometers
Calibration
Chemical analysis
cavities
Laser resonators
Surface emitting lasers
laser cavities
Photodiodes
surface emitting lasers
photodiodes
reflectance
curves

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Growth of resonant-cavity enhanced photodetectors by MBE with in situ feedback control using spectroscopic ellipsometry. / Beaudoin, M.; Kelkar, P.; Boonzaayer, M. D.; Braun, W.; Dowd, P.; Johnson, Shane; Koelle, U.; Ryu, C. M.; Zhang, Yong-Hang.

In: Journal of Crystal Growth, Vol. 201, 05.1999, p. 990-993.

Research output: Contribution to journalArticle

Beaudoin, M. ; Kelkar, P. ; Boonzaayer, M. D. ; Braun, W. ; Dowd, P. ; Johnson, Shane ; Koelle, U. ; Ryu, C. M. ; Zhang, Yong-Hang. / Growth of resonant-cavity enhanced photodetectors by MBE with in situ feedback control using spectroscopic ellipsometry. In: Journal of Crystal Growth. 1999 ; Vol. 201. pp. 990-993.
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AU - Johnson, Shane

AU - Koelle, U.

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