Growth of high-quality AlN layers on sapphire substrates at relatively low temperatures by metalorganic chemical vapor deposition

Xiao Hang Li, Shuo Wang, Hongen Xie, Yong O. Wei, Tsung Ting Kao, Md Mahbub Satter, Shyh Chiang Shen, Paul Douglas Yoder, Theeradetch Detchprohm, Russell D. Dupuis, Alec M. Fischer, Fernando Ponce

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Engineering & Materials Science

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