Growth dynamics of titanium silicide nanowires observed with low-energy electron microscopy

Peter Bennett; B. Ashcroft; Zhian He; R. M. Tromp

doi:10.1116/1.1525006

Growth dynamics of titanium silicide nanowires observed with low-energy electron microscopy

Peter Bennett, B. Ashcroft, Zhian He, R. M. Tromp

Physics

Research output: Contribution to journal › Article › peer-review

30 Scopus citations

Abstract

Spontaneous nanowire (NW) formation in the Ti/Si(111) system was followed and found to occur during reactive epitaxy at T∼850°C. Dynamic observations show that the rate-limiting kinetic step during both growth and shrinking of the NWs is the silicide reaction at the island ends.

Original language	English (US)
Pages (from-to)	2500-2504
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	20
Issue number	6
DOIs	https://doi.org/10.1116/1.1525006
State	Published - Nov 1 2002

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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title = "Growth dynamics of titanium silicide nanowires observed with low-energy electron microscopy",

abstract = "Spontaneous nanowire (NW) formation in the Ti/Si(111) system was followed and found to occur during reactive epitaxy at T∼850°C. Dynamic observations show that the rate-limiting kinetic step during both growth and shrinking of the NWs is the silicide reaction at the island ends.",

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AU - Bennett, Peter

AU - Ashcroft, B.

AU - He, Zhian

AU - Tromp, R. M.

PY - 2002/11/1

Y1 - 2002/11/1

N2 - Spontaneous nanowire (NW) formation in the Ti/Si(111) system was followed and found to occur during reactive epitaxy at T∼850°C. Dynamic observations show that the rate-limiting kinetic step during both growth and shrinking of the NWs is the silicide reaction at the island ends.

AB - Spontaneous nanowire (NW) formation in the Ti/Si(111) system was followed and found to occur during reactive epitaxy at T∼850°C. Dynamic observations show that the rate-limiting kinetic step during both growth and shrinking of the NWs is the silicide reaction at the island ends.

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SN - 1071-1023

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JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

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ER -

Growth dynamics of titanium silicide nanowires observed with low-energy electron microscopy

Abstract

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