Growth behavior near the ultimate resolution of nanometer-scale focused electron beam-induced deposition

W. F. Van Dorp, C. W. Hagen, Peter Crozier, P. Kruit

Research output: Contribution to journalArticle

38 Citations (Scopus)

Abstract

An attempt has been made to reach the ultimate spatial resolution for electron beam-induced deposition (EBID) using W(CO)6 as a precursor. The smallest dots that have been written have an average diameter of 0.72 nm at full width at half maximum (FWHM). A study of the nucleation stage revealed that the growth is different for each dot, despite identical growth conditions. The center of mass of each dot is not exactly on the position irradiated by the e-beam but on a random spot close to the irradiated spot. Also, the growth rate is not constant during deposition and the final deposited volume varies from dot to dot. The annular dark field signal was recorded during growth in the hope to find discrete steps in the signal which would be evidence of the one-by-one deposition of single molecules. Discrete steps were not observed, but by combining atomic force microscope measurements and a statistical analysis of the deposited volumes, it was possible to estimate the average volume of the units of which the deposits consist. It is concluded that the volume per unit is as small as 0.4 nm3, less than twice the volume of a single W(CO) 6 molecule in the solid phase.

Original languageEnglish (US)
Article number225305
JournalNanotechnology
Volume19
Issue number22
DOIs
StatePublished - Jun 4 2008

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Electron beams
Molecules
Full width at half maximum
Statistical methods
Microscopes
Nucleation
Deposits
hexacarbonyltungsten

ASJC Scopus subject areas

  • Materials Science(all)
  • Bioengineering
  • Chemistry(all)
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Growth behavior near the ultimate resolution of nanometer-scale focused electron beam-induced deposition. / Van Dorp, W. F.; Hagen, C. W.; Crozier, Peter; Kruit, P.

In: Nanotechnology, Vol. 19, No. 22, 225305, 04.06.2008.

Research output: Contribution to journalArticle

@article{dffd3faa5c994f7abcaa8fa5ade7d77a,
title = "Growth behavior near the ultimate resolution of nanometer-scale focused electron beam-induced deposition",
abstract = "An attempt has been made to reach the ultimate spatial resolution for electron beam-induced deposition (EBID) using W(CO)6 as a precursor. The smallest dots that have been written have an average diameter of 0.72 nm at full width at half maximum (FWHM). A study of the nucleation stage revealed that the growth is different for each dot, despite identical growth conditions. The center of mass of each dot is not exactly on the position irradiated by the e-beam but on a random spot close to the irradiated spot. Also, the growth rate is not constant during deposition and the final deposited volume varies from dot to dot. The annular dark field signal was recorded during growth in the hope to find discrete steps in the signal which would be evidence of the one-by-one deposition of single molecules. Discrete steps were not observed, but by combining atomic force microscope measurements and a statistical analysis of the deposited volumes, it was possible to estimate the average volume of the units of which the deposits consist. It is concluded that the volume per unit is as small as 0.4 nm3, less than twice the volume of a single W(CO) 6 molecule in the solid phase.",
author = "{Van Dorp}, {W. F.} and Hagen, {C. W.} and Peter Crozier and P. Kruit",
year = "2008",
month = "6",
day = "4",
doi = "10.1088/0957-4484/19/22/225305",
language = "English (US)",
volume = "19",
journal = "Nanotechnology",
issn = "0957-4484",
publisher = "IOP Publishing Ltd.",
number = "22",

}

TY - JOUR

T1 - Growth behavior near the ultimate resolution of nanometer-scale focused electron beam-induced deposition

AU - Van Dorp, W. F.

AU - Hagen, C. W.

AU - Crozier, Peter

AU - Kruit, P.

PY - 2008/6/4

Y1 - 2008/6/4

N2 - An attempt has been made to reach the ultimate spatial resolution for electron beam-induced deposition (EBID) using W(CO)6 as a precursor. The smallest dots that have been written have an average diameter of 0.72 nm at full width at half maximum (FWHM). A study of the nucleation stage revealed that the growth is different for each dot, despite identical growth conditions. The center of mass of each dot is not exactly on the position irradiated by the e-beam but on a random spot close to the irradiated spot. Also, the growth rate is not constant during deposition and the final deposited volume varies from dot to dot. The annular dark field signal was recorded during growth in the hope to find discrete steps in the signal which would be evidence of the one-by-one deposition of single molecules. Discrete steps were not observed, but by combining atomic force microscope measurements and a statistical analysis of the deposited volumes, it was possible to estimate the average volume of the units of which the deposits consist. It is concluded that the volume per unit is as small as 0.4 nm3, less than twice the volume of a single W(CO) 6 molecule in the solid phase.

AB - An attempt has been made to reach the ultimate spatial resolution for electron beam-induced deposition (EBID) using W(CO)6 as a precursor. The smallest dots that have been written have an average diameter of 0.72 nm at full width at half maximum (FWHM). A study of the nucleation stage revealed that the growth is different for each dot, despite identical growth conditions. The center of mass of each dot is not exactly on the position irradiated by the e-beam but on a random spot close to the irradiated spot. Also, the growth rate is not constant during deposition and the final deposited volume varies from dot to dot. The annular dark field signal was recorded during growth in the hope to find discrete steps in the signal which would be evidence of the one-by-one deposition of single molecules. Discrete steps were not observed, but by combining atomic force microscope measurements and a statistical analysis of the deposited volumes, it was possible to estimate the average volume of the units of which the deposits consist. It is concluded that the volume per unit is as small as 0.4 nm3, less than twice the volume of a single W(CO) 6 molecule in the solid phase.

UR - http://www.scopus.com/inward/record.url?scp=43249104389&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=43249104389&partnerID=8YFLogxK

U2 - 10.1088/0957-4484/19/22/225305

DO - 10.1088/0957-4484/19/22/225305

M3 - Article

C2 - 21825760

AN - SCOPUS:43249104389

VL - 19

JO - Nanotechnology

JF - Nanotechnology

SN - 0957-4484

IS - 22

M1 - 225305

ER -