Growth and structure of epitaxial CeO2 films on yttria-stabilized ZrO2

F. Wu, A. Pavlovska, David Smith, Robert Culbertson, B. J. Wilkens, E. Bauer

Research output: Contribution to journalArticle

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Abstract

Thirty to a hundred-nm thick epitaxial CeO2 layers are grown on YSZ (100), (110) and (111) surfaces of yttria-stabilized ZrO2 (YSZ) by electron beam evaporation of Ce in oxygen at reduced pressure. Their growth, structure and thermal stability are studied with several bulk and surface sensitive techniques including Rutherford backscattering spectrometry, cross-sectional high resolution electron microscopy, low energy electron diffraction and low energy reflection electron microscopy. Excellent epitaxy is obtained on all YSZ surfaces at a growth temperature of 750 K. The surfaces of films grown on (111)-oriented substrates are flat, whereas those on the other substrates are faceted into small (111) planes. The grain sizes in the films are in the 10 nm range and smaller.

Original languageEnglish (US)
Pages (from-to)4908-4914
Number of pages7
JournalThin Solid Films
Volume516
Issue number15
DOIs
StatePublished - Jun 2 2008

Fingerprint

Yttrium oxide
Epitaxial films
electron microscopy
Low energy electron diffraction
High resolution electron microscopy
Epitaxial layers
Rutherford backscattering spectroscopy
Growth temperature
Substrates
Epitaxial growth
epitaxy
Spectrometry
Electron microscopy
Electron beams
backscattering
Evaporation
Thermodynamic stability
thermal stability
electron diffraction
grain size

Keywords

  • Cerium oxide
  • Epitaxy
  • Low energy electron diffraction
  • Rutherford backscattering spectroscopy
  • Surface morphology
  • Surface structure
  • Transmission electron microscopy
  • Zirconium oxide

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Growth and structure of epitaxial CeO2 films on yttria-stabilized ZrO2 . / Wu, F.; Pavlovska, A.; Smith, David; Culbertson, Robert; Wilkens, B. J.; Bauer, E.

In: Thin Solid Films, Vol. 516, No. 15, 02.06.2008, p. 4908-4914.

Research output: Contribution to journalArticle

Wu, F. ; Pavlovska, A. ; Smith, David ; Culbertson, Robert ; Wilkens, B. J. ; Bauer, E. / Growth and structure of epitaxial CeO2 films on yttria-stabilized ZrO2 In: Thin Solid Films. 2008 ; Vol. 516, No. 15. pp. 4908-4914.
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AU - Bauer, E.

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