Growth and characterization of diamond thin films

Robert J. Nemanich

doi:10.1146/annurev.ms.21.080191.002535

Growth and characterization of diamond thin films

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	535-558
Number of pages	24
Journal	Annual Review of Materials Science
Volume	21
Issue number	1
DOIs	https://doi.org/10.1146/annurev.ms.21.080191.002535
State	Published - 1991
Externally published	Yes

Keywords

Atomic structure and bonding
Diamond films
In situ characterization
Interface structure
Morphology

ASJC Scopus subject areas

General Materials Science

Access to Document

10.1146/annurev.ms.21.080191.002535

Cite this

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title = "Growth and characterization of diamond thin films",

keywords = "Atomic structure and bonding, Diamond films, In situ characterization, Interface structure, Morphology",

author = "Nemanich, {Robert J.}",

year = "1991",

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language = "English (US)",

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journal = "Annual Review of Materials Science",

issn = "0084-6600",

publisher = "Annual Reviews Inc.",

number = "1",

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TY - JOUR

T1 - Growth and characterization of diamond thin films

AU - Nemanich, Robert J.

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Y1 - 1991

KW - Atomic structure and bonding

KW - Diamond films

KW - In situ characterization

KW - Interface structure

KW - Morphology

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DO - 10.1146/annurev.ms.21.080191.002535

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SP - 535

EP - 558

JO - Annual Review of Materials Science

JF - Annual Review of Materials Science

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Growth and characterization of diamond thin films

Keywords

ASJC Scopus subject areas

Access to Document

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