Gold Schottky contacts on oxygen plasma-treated, n-type ZnO(0001̄)

B. J. Coppa, R. F. Davis, R. J. Nemanich

Research output: Contribution to journalArticle

353 Scopus citations

Abstract

Stoichiometric, highly ordered, and smooth ZnO surfaces were produced via exposure to a remote oxygen/He plasma. A 40-nm-thick Ti film was deposited by electron beam evaporation on the entire (0001) face of each ZnO piece. Atomic force microscopy studies revealed a rms surface roughness of 0.2±0.2nm before and after the plasma clean. The best contact behavior was found for plasma-cleaned surfaces that were subsequently cooled to room temperature in the unignited plasma gas and subsequently exposed to the plasma for 30 s.

Original languageEnglish (US)
Pages (from-to)400-402
Number of pages3
JournalApplied Physics Letters
Volume82
Issue number3
DOIs
StatePublished - Jan 20 2003
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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