Gold Schottky contacts on oxygen plasma-treated, n-type ZnO(0001̄)

B. J. Coppa; R. F. Davis; R. J. Nemanich

doi:10.1063/1.1536264

Gold Schottky contacts on oxygen plasma-treated, n-type ZnO(0001̄)

B. J. Coppa, R. F. Davis, R. J. Nemanich

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394 Scopus citations

Abstract

Stoichiometric, highly ordered, and smooth ZnO surfaces were produced via exposure to a remote oxygen/He plasma. A 40-nm-thick Ti film was deposited by electron beam evaporation on the entire (0001) face of each ZnO piece. Atomic force microscopy studies revealed a rms surface roughness of 0.2±0.2nm before and after the plasma clean. The best contact behavior was found for plasma-cleaned surfaces that were subsequently cooled to room temperature in the unignited plasma gas and subsequently exposed to the plasma for 30 s.

Original language	English (US)
Pages (from-to)	400-402
Number of pages	3
Journal	Applied Physics Letters
Volume	82
Issue number	3
DOIs	https://doi.org/10.1063/1.1536264
State	Published - Jan 20 2003
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.1536264

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abstract = "Stoichiometric, highly ordered, and smooth ZnO surfaces were produced via exposure to a remote oxygen/He plasma. A 40-nm-thick Ti film was deposited by electron beam evaporation on the entire (0001) face of each ZnO piece. Atomic force microscopy studies revealed a rms surface roughness of 0.2±0.2nm before and after the plasma clean. The best contact behavior was found for plasma-cleaned surfaces that were subsequently cooled to room temperature in the unignited plasma gas and subsequently exposed to the plasma for 30 s.",

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AU - Nemanich, R. J.

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AB - Stoichiometric, highly ordered, and smooth ZnO surfaces were produced via exposure to a remote oxygen/He plasma. A 40-nm-thick Ti film was deposited by electron beam evaporation on the entire (0001) face of each ZnO piece. Atomic force microscopy studies revealed a rms surface roughness of 0.2±0.2nm before and after the plasma clean. The best contact behavior was found for plasma-cleaned surfaces that were subsequently cooled to room temperature in the unignited plasma gas and subsequently exposed to the plasma for 30 s.

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Gold Schottky contacts on oxygen plasma-treated, n-type ZnO(0001̄)

Abstract

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