Gold Schottky contacts on oxygen plasma-treated, n-type ZnO(0001̄)

B. J. Coppa, R. F. Davis, Robert Nemanich

Research output: Contribution to journalArticle

341 Citations (Scopus)

Abstract

Stoichiometric, highly ordered, and smooth ZnO surfaces were produced via exposure to a remote oxygen/He plasma. A 40-nm-thick Ti film was deposited by electron beam evaporation on the entire (0001) face of each ZnO piece. Atomic force microscopy studies revealed a rms surface roughness of 0.2±0.2nm before and after the plasma clean. The best contact behavior was found for plasma-cleaned surfaces that were subsequently cooled to room temperature in the unignited plasma gas and subsequently exposed to the plasma for 30 s.

Original languageEnglish (US)
Pages (from-to)400-402
Number of pages3
JournalApplied Physics Letters
Volume82
Issue number3
DOIs
StatePublished - Jan 20 2003
Externally publishedYes

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oxygen plasma
electric contacts
gold
thick films
surface roughness
evaporation
atomic force microscopy
electron beams
room temperature
gases

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Gold Schottky contacts on oxygen plasma-treated, n-type ZnO(0001̄). / Coppa, B. J.; Davis, R. F.; Nemanich, Robert.

In: Applied Physics Letters, Vol. 82, No. 3, 20.01.2003, p. 400-402.

Research output: Contribution to journalArticle

Coppa, B. J. ; Davis, R. F. ; Nemanich, Robert. / Gold Schottky contacts on oxygen plasma-treated, n-type ZnO(0001̄). In: Applied Physics Letters. 2003 ; Vol. 82, No. 3. pp. 400-402.
@article{c58cf33b513c4c2b96bf7eb3215c7f51,
title = "Gold Schottky contacts on oxygen plasma-treated, n-type ZnO(0001̄)",
abstract = "Stoichiometric, highly ordered, and smooth ZnO surfaces were produced via exposure to a remote oxygen/He plasma. A 40-nm-thick Ti film was deposited by electron beam evaporation on the entire (0001) face of each ZnO piece. Atomic force microscopy studies revealed a rms surface roughness of 0.2±0.2nm before and after the plasma clean. The best contact behavior was found for plasma-cleaned surfaces that were subsequently cooled to room temperature in the unignited plasma gas and subsequently exposed to the plasma for 30 s.",
author = "Coppa, {B. J.} and Davis, {R. F.} and Robert Nemanich",
year = "2003",
month = "1",
day = "20",
doi = "10.1063/1.1536264",
language = "English (US)",
volume = "82",
pages = "400--402",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "3",

}

TY - JOUR

T1 - Gold Schottky contacts on oxygen plasma-treated, n-type ZnO(0001̄)

AU - Coppa, B. J.

AU - Davis, R. F.

AU - Nemanich, Robert

PY - 2003/1/20

Y1 - 2003/1/20

N2 - Stoichiometric, highly ordered, and smooth ZnO surfaces were produced via exposure to a remote oxygen/He plasma. A 40-nm-thick Ti film was deposited by electron beam evaporation on the entire (0001) face of each ZnO piece. Atomic force microscopy studies revealed a rms surface roughness of 0.2±0.2nm before and after the plasma clean. The best contact behavior was found for plasma-cleaned surfaces that were subsequently cooled to room temperature in the unignited plasma gas and subsequently exposed to the plasma for 30 s.

AB - Stoichiometric, highly ordered, and smooth ZnO surfaces were produced via exposure to a remote oxygen/He plasma. A 40-nm-thick Ti film was deposited by electron beam evaporation on the entire (0001) face of each ZnO piece. Atomic force microscopy studies revealed a rms surface roughness of 0.2±0.2nm before and after the plasma clean. The best contact behavior was found for plasma-cleaned surfaces that were subsequently cooled to room temperature in the unignited plasma gas and subsequently exposed to the plasma for 30 s.

UR - http://www.scopus.com/inward/record.url?scp=0037455341&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0037455341&partnerID=8YFLogxK

U2 - 10.1063/1.1536264

DO - 10.1063/1.1536264

M3 - Article

VL - 82

SP - 400

EP - 402

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 3

ER -