Ge Island evolution during growth, in-situ anneal, and Si capping in an industrial CVD reactor

Roger Loo, Philippe Meunier-Beillard, Didier Dentel, Michael Goryll, Danielle Vanhaeren, Lili Vescan, Hugo Bender, Matty Caymax, Wilfried Vandervorst

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

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Engineering & Materials Science

Chemical Compounds