Fully differential current-mode MEMS dual-axis optical inclination sensor

David Welch, Julius Georgiou, Jennifer Blain Christen

Research output: Contribution to journalArticle

13 Scopus citations

Abstract

We demonstrate a tilt sensor fabricated in the MultiMEMS SensoNor process. The system uses an array of four photodiodes to determine the position of a bubble fluid pendulum and the tilt angle with respect to gravity. The entire sensing structure was manufactured in the commercial MultiMEMS process so it can be easily reproduced in large quantities. The device was tested across a range of inclinations to verify performance in sensing two axis tilt. Results for tilt measurements from -45° to +45° show correlation to expected values with an R2 value of 0.99595. The resolution of the device is 0.5° at zero degrees of inclination. The outputs of the sensor are mapped to a fit equation to allow calculation of inclination angle. The small size, simple structure, and minimal power consumption make it well-suited for a number of research and industrial applications.

Original languageEnglish (US)
Pages (from-to)133-139
Number of pages7
JournalSensors and Actuators, A: Physical
Volume192
DOIs
StatePublished - Feb 4 2013

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Keywords

  • Inclinometer
  • MEMS
  • Microfluidic
  • Quadrant photodetector
  • Tilt sensor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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