Fully differential current-mode MEMS dual-axis optical inclination sensor

David Welch, Julius Georgiou, Jennifer Blain Christen

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

We demonstrate a tilt sensor fabricated in the MultiMEMS SensoNor process. The system uses an array of four photodiodes to determine the position of a bubble fluid pendulum and the tilt angle with respect to gravity. The entire sensing structure was manufactured in the commercial MultiMEMS process so it can be easily reproduced in large quantities. The device was tested across a range of inclinations to verify performance in sensing two axis tilt. Results for tilt measurements from -45° to +45° show correlation to expected values with an R2 value of 0.99595. The resolution of the device is 0.5° at zero degrees of inclination. The outputs of the sensor are mapped to a fit equation to allow calculation of inclination angle. The small size, simple structure, and minimal power consumption make it well-suited for a number of research and industrial applications.

Original languageEnglish (US)
Pages (from-to)133-139
Number of pages7
JournalSensors and Actuators, A: Physical
Volume192
DOIs
StatePublished - 2013

Fingerprint

Optical sensors
microelectromechanical systems
MEMS
inclination
sensors
Sensors
Pendulums
Photodiodes
Industrial applications
Gravitation
Electric power utilization
Fluids
pendulums
photodiodes
bubbles
gravitation
output
fluids

Keywords

  • Inclinometer
  • MEMS
  • Microfluidic
  • Quadrant photodetector
  • Tilt sensor

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Instrumentation

Cite this

Fully differential current-mode MEMS dual-axis optical inclination sensor. / Welch, David; Georgiou, Julius; Blain Christen, Jennifer.

In: Sensors and Actuators, A: Physical, Vol. 192, 2013, p. 133-139.

Research output: Contribution to journalArticle

@article{f427bfc503874d0a8158be6725de352f,
title = "Fully differential current-mode MEMS dual-axis optical inclination sensor",
abstract = "We demonstrate a tilt sensor fabricated in the MultiMEMS SensoNor process. The system uses an array of four photodiodes to determine the position of a bubble fluid pendulum and the tilt angle with respect to gravity. The entire sensing structure was manufactured in the commercial MultiMEMS process so it can be easily reproduced in large quantities. The device was tested across a range of inclinations to verify performance in sensing two axis tilt. Results for tilt measurements from -45° to +45° show correlation to expected values with an R2 value of 0.99595. The resolution of the device is 0.5° at zero degrees of inclination. The outputs of the sensor are mapped to a fit equation to allow calculation of inclination angle. The small size, simple structure, and minimal power consumption make it well-suited for a number of research and industrial applications.",
keywords = "Inclinometer, MEMS, Microfluidic, Quadrant photodetector, Tilt sensor",
author = "David Welch and Julius Georgiou and {Blain Christen}, Jennifer",
year = "2013",
doi = "10.1016/j.sna.2012.12.001",
language = "English (US)",
volume = "192",
pages = "133--139",
journal = "Sensors and Actuators, A: Physical",
issn = "0924-4247",
publisher = "Elsevier",

}

TY - JOUR

T1 - Fully differential current-mode MEMS dual-axis optical inclination sensor

AU - Welch, David

AU - Georgiou, Julius

AU - Blain Christen, Jennifer

PY - 2013

Y1 - 2013

N2 - We demonstrate a tilt sensor fabricated in the MultiMEMS SensoNor process. The system uses an array of four photodiodes to determine the position of a bubble fluid pendulum and the tilt angle with respect to gravity. The entire sensing structure was manufactured in the commercial MultiMEMS process so it can be easily reproduced in large quantities. The device was tested across a range of inclinations to verify performance in sensing two axis tilt. Results for tilt measurements from -45° to +45° show correlation to expected values with an R2 value of 0.99595. The resolution of the device is 0.5° at zero degrees of inclination. The outputs of the sensor are mapped to a fit equation to allow calculation of inclination angle. The small size, simple structure, and minimal power consumption make it well-suited for a number of research and industrial applications.

AB - We demonstrate a tilt sensor fabricated in the MultiMEMS SensoNor process. The system uses an array of four photodiodes to determine the position of a bubble fluid pendulum and the tilt angle with respect to gravity. The entire sensing structure was manufactured in the commercial MultiMEMS process so it can be easily reproduced in large quantities. The device was tested across a range of inclinations to verify performance in sensing two axis tilt. Results for tilt measurements from -45° to +45° show correlation to expected values with an R2 value of 0.99595. The resolution of the device is 0.5° at zero degrees of inclination. The outputs of the sensor are mapped to a fit equation to allow calculation of inclination angle. The small size, simple structure, and minimal power consumption make it well-suited for a number of research and industrial applications.

KW - Inclinometer

KW - MEMS

KW - Microfluidic

KW - Quadrant photodetector

KW - Tilt sensor

UR - http://www.scopus.com/inward/record.url?scp=84873854724&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84873854724&partnerID=8YFLogxK

U2 - 10.1016/j.sna.2012.12.001

DO - 10.1016/j.sna.2012.12.001

M3 - Article

VL - 192

SP - 133

EP - 139

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

SN - 0924-4247

ER -