Formation of silicides in a cavity applicator microwave system

D. C. Thompson; H. C. Kim; Terry Alford; J. W. Mayer

doi:10.1063/1.1625430

Formation of silicides in a cavity applicator microwave system

D. C. Thompson, H. C. Kim, Terry Alford, J. W. Mayer

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

Abstract

The synthesis of metal silicides in a cavity applicator microwave system was studied. The silicide phase present and the layer thicknesses were identified by using x-ray diffraction, Rutherford backscattering spectrometry and four-point-probe measurements. It was found that the products attained from heating by microwaves do not differ much from those attained in heating by thermal processes.

Original language	English (US)
Pages (from-to)	3918-3920
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	19
DOIs	https://doi.org/10.1063/1.1625430
State	Published - Nov 10 2003

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

Access to Document

10.1063/1.1625430

Cite this

@article{55bfb3be945946c9bd6c01130db9d5e5,

title = "Formation of silicides in a cavity applicator microwave system",

abstract = "The synthesis of metal silicides in a cavity applicator microwave system was studied. The silicide phase present and the layer thicknesses were identified by using x-ray diffraction, Rutherford backscattering spectrometry and four-point-probe measurements. It was found that the products attained from heating by microwaves do not differ much from those attained in heating by thermal processes.",

author = "Thompson, {D. C.} and Kim, {H. C.} and Terry Alford and Mayer, {J. W.}",

year = "2003",

month = nov,

day = "10",

doi = "10.1063/1.1625430",

language = "English (US)",

volume = "83",

pages = "3918--3920",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "19",

}

TY - JOUR

T1 - Formation of silicides in a cavity applicator microwave system

AU - Thompson, D. C.

AU - Kim, H. C.

AU - Alford, Terry

AU - Mayer, J. W.

PY - 2003/11/10

Y1 - 2003/11/10

N2 - The synthesis of metal silicides in a cavity applicator microwave system was studied. The silicide phase present and the layer thicknesses were identified by using x-ray diffraction, Rutherford backscattering spectrometry and four-point-probe measurements. It was found that the products attained from heating by microwaves do not differ much from those attained in heating by thermal processes.

AB - The synthesis of metal silicides in a cavity applicator microwave system was studied. The silicide phase present and the layer thicknesses were identified by using x-ray diffraction, Rutherford backscattering spectrometry and four-point-probe measurements. It was found that the products attained from heating by microwaves do not differ much from those attained in heating by thermal processes.

UR - http://www.scopus.com/inward/record.url?scp=0345376822&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0345376822&partnerID=8YFLogxK

U2 - 10.1063/1.1625430

DO - 10.1063/1.1625430

M3 - Article

AN - SCOPUS:0345376822

SN - 0003-6951

VL - 83

SP - 3918

EP - 3920

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 19

ER -

Formation of silicides in a cavity applicator microwave system

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this