The synthesis of metal silicides in a cavity applicator microwave system was studied. The silicide phase present and the layer thicknesses were identified by using x-ray diffraction, Rutherford backscattering spectrometry and four-point-probe measurements. It was found that the products attained from heating by microwaves do not differ much from those attained in heating by thermal processes.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)