Formation of silicides in a cavity applicator microwave system

D. C. Thompson, H. C. Kim, Terry Alford, J. W. Mayer

Research output: Contribution to journalArticlepeer-review

15 Scopus citations

Abstract

The synthesis of metal silicides in a cavity applicator microwave system was studied. The silicide phase present and the layer thicknesses were identified by using x-ray diffraction, Rutherford backscattering spectrometry and four-point-probe measurements. It was found that the products attained from heating by microwaves do not differ much from those attained in heating by thermal processes.

Original languageEnglish (US)
Pages (from-to)3918-3920
Number of pages3
JournalApplied Physics Letters
Volume83
Issue number19
DOIs
StatePublished - Nov 10 2003

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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