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Focused Ion Beam Assisted, Pattern-less Transfer of Thin Films
Terry Alford
(Inventor)
Arizona State University
Research output
:
Patent
Overview
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Physics & Astronomy
ion beams
100%
inventions
95%
thin films
66%
ions
60%
etching
55%
insulators
40%
profiles
39%
silicon
29%
donor materials
28%
costs
27%
reuse
24%
ion currents
18%
implantation
16%
performance
16%
surface layers
16%
manufacturing
15%
transistors
14%
wafers
13%