TY - GEN
T1 - Flip-chip based packaging for linear ratcheting microactuators enables 3d stacks of moveble microelectrodes for the brain
AU - Sutanto, J.
AU - Anand, S.
AU - Korb, R.
AU - Zhou, L.
AU - Okandan, M.
AU - Baker, M.
AU - Muthuswamy, Jitendran
N1 - Publisher Copyright:
© 2012 TRF.
PY - 2012
Y1 - 2012
N2 - MEMS based movable microelectrodes now offer the exciting possibility of developing a fully autonomous implantable neural prosthetic system. However, critical interconnect and packaging challenges remain. We report here a novel flip-chip based interconnect and packaging approach for the implantable MEMS microelectrodes with complex moving structures on the die. The proposed approach is chip-scale, versatile (applicable to a variety of substrates and dies), scalable (allowing the realization of 3D stacks), and low-cost. We report here successful in vivo testing of this non-hermetically encapsulated flip-chip based package in long-term rodent experiments.
AB - MEMS based movable microelectrodes now offer the exciting possibility of developing a fully autonomous implantable neural prosthetic system. However, critical interconnect and packaging challenges remain. We report here a novel flip-chip based interconnect and packaging approach for the implantable MEMS microelectrodes with complex moving structures on the die. The proposed approach is chip-scale, versatile (applicable to a variety of substrates and dies), scalable (allowing the realization of 3D stacks), and low-cost. We report here successful in vivo testing of this non-hermetically encapsulated flip-chip based package in long-term rodent experiments.
UR - http://www.scopus.com/inward/record.url?scp=84944685651&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84944685651&partnerID=8YFLogxK
U2 - 10.31438/trf.hh2012.42
DO - 10.31438/trf.hh2012.42
M3 - Conference contribution
AN - SCOPUS:84944685651
T3 - Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop
SP - 157
EP - 160
BT - 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012
A2 - Mehregany, Mehran
A2 - Monk, David J.
PB - Transducer Research Foundation
T2 - 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012
Y2 - 3 June 2012 through 7 June 2012
ER -