Flexible ISFET biosensor using IGZO metal oxide TFTs and an ITO sensing layer

Joseph T. Smith; Sahil S. Shah; Michael Goryll; John R. Stowell; David Allee

doi:10.1109/JSEN.2013.2295057

Flexible ISFET biosensor using IGZO metal oxide TFTs and an ITO sensing layer

Joseph T. Smith, Sahil S. Shah, Michael Goryll, John R. Stowell, David Allee

Research output: Contribution to journal › Article › peer-review

57 Scopus citations

Abstract

This letter presents the fabrication details and measured performance of a prototype flexible extended-gate ion-sensitive field effect transistor (ISFET) biosensor, manufactured using a metal oxide indium-gallium-zinc oxide thin film transistor and an indium-tin oxide sensing layer on a 125-μm thick flexible plastic substrate. ISFET drain current was shown to respond correctly to the _pH buffer concentration with repeatable pH sensitivity observed over multiple cycles. These results demonstrate the initial viability of directly extending flexible plastic substrate organic light emitting diode display technology to the production of low-cost, plastic ISFET biosensors.

Original language	English (US)
Article number	6684572
Pages (from-to)	937-938
Number of pages	2
Journal	IEEE Sensors Journal
Volume	14
Issue number	4
DOIs	https://doi.org/10.1109/JSEN.2013.2295057
State	Published - Apr 2014

Keywords

Biosensor
IGZO
ISFET
TFT
flexible electronics

ASJC Scopus subject areas

Instrumentation
Electrical and Electronic Engineering

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10.1109/JSEN.2013.2295057

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abstract = "This letter presents the fabrication details and measured performance of a prototype flexible extended-gate ion-sensitive field effect transistor (ISFET) biosensor, manufactured using a metal oxide indium-gallium-zinc oxide thin film transistor and an indium-tin oxide sensing layer on a 125-μm thick flexible plastic substrate. ISFET drain current was shown to respond correctly to the pH buffer concentration with repeatable pH sensitivity observed over multiple cycles. These results demonstrate the initial viability of directly extending flexible plastic substrate organic light emitting diode display technology to the production of low-cost, plastic ISFET biosensors.",

keywords = "Biosensor, IGZO, ISFET, TFT, flexible electronics",

author = "Smith, {Joseph T.} and Shah, {Sahil S.} and Michael Goryll and Stowell, {John R.} and David Allee",

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AU - Allee, David

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AB - This letter presents the fabrication details and measured performance of a prototype flexible extended-gate ion-sensitive field effect transistor (ISFET) biosensor, manufactured using a metal oxide indium-gallium-zinc oxide thin film transistor and an indium-tin oxide sensing layer on a 125-μm thick flexible plastic substrate. ISFET drain current was shown to respond correctly to the pH buffer concentration with repeatable pH sensitivity observed over multiple cycles. These results demonstrate the initial viability of directly extending flexible plastic substrate organic light emitting diode display technology to the production of low-cost, plastic ISFET biosensors.

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KW - IGZO

KW - ISFET

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Flexible ISFET biosensor using IGZO metal oxide TFTs and an ITO sensing layer

Abstract

Keywords

ASJC Scopus subject areas

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