Film bulk acoustic-wave resonator based ultraviolet sensor

X. Qiu; J. Zhu; J. Oiler; C. Yu; Z. Wang; H. Yu

doi:10.1063/1.3122342

Film bulk acoustic-wave resonator based ultraviolet sensor

X. Qiu, J. Zhu, J. Oiler, C. Yu, Z. Wang, H. Yu

Research output: Contribution to journal › Article › peer-review

65 Scopus citations

Abstract

This letter described ultraviolet (UV) radiation sensing with ZnO based film bulk acoustic-wave resonator (FBAR). The resonant frequency upshifted when there was UV illumination on the FBAR. For 365 nm UV light, the frequency upshift was 9.8 kHz with an intensity of 600 μW/ cm2, and the detection limit of the sensor was 6.5 nW. The frequency increase in the FBAR UV sensor was proposed to be due to the density decrease in ZnO film upon UV illumination. When UV was incident on the ZnO film, it can cause oxygen desorption from the ZnO surface, resulting in density decrease in the film. This study has proven the feasibility of detection of low intensity UV using ZnO film based FBAR.

Original language	English (US)
Article number	151917
Journal	Applied Physics Letters
Volume	94
Issue number	15
DOIs	https://doi.org/10.1063/1.3122342
State	Published - 2009

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.3122342

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title = "Film bulk acoustic-wave resonator based ultraviolet sensor",

abstract = "This letter described ultraviolet (UV) radiation sensing with ZnO based film bulk acoustic-wave resonator (FBAR). The resonant frequency upshifted when there was UV illumination on the FBAR. For 365 nm UV light, the frequency upshift was 9.8 kHz with an intensity of 600 μW/ cm2, and the detection limit of the sensor was 6.5 nW. The frequency increase in the FBAR UV sensor was proposed to be due to the density decrease in ZnO film upon UV illumination. When UV was incident on the ZnO film, it can cause oxygen desorption from the ZnO surface, resulting in density decrease in the film. This study has proven the feasibility of detection of low intensity UV using ZnO film based FBAR.",

author = "X. Qiu and J. Zhu and J. Oiler and C. Yu and Z. Wang and H. Yu",

year = "2009",

doi = "10.1063/1.3122342",

language = "English (US)",

volume = "94",

journal = "Applied Physics Letters",

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T1 - Film bulk acoustic-wave resonator based ultraviolet sensor

AU - Qiu, X.

AU - Zhu, J.

AU - Oiler, J.

AU - Yu, C.

AU - Wang, Z.

AU - Yu, H.

PY - 2009

Y1 - 2009

N2 - This letter described ultraviolet (UV) radiation sensing with ZnO based film bulk acoustic-wave resonator (FBAR). The resonant frequency upshifted when there was UV illumination on the FBAR. For 365 nm UV light, the frequency upshift was 9.8 kHz with an intensity of 600 μW/ cm2, and the detection limit of the sensor was 6.5 nW. The frequency increase in the FBAR UV sensor was proposed to be due to the density decrease in ZnO film upon UV illumination. When UV was incident on the ZnO film, it can cause oxygen desorption from the ZnO surface, resulting in density decrease in the film. This study has proven the feasibility of detection of low intensity UV using ZnO film based FBAR.

AB - This letter described ultraviolet (UV) radiation sensing with ZnO based film bulk acoustic-wave resonator (FBAR). The resonant frequency upshifted when there was UV illumination on the FBAR. For 365 nm UV light, the frequency upshift was 9.8 kHz with an intensity of 600 μW/ cm2, and the detection limit of the sensor was 6.5 nW. The frequency increase in the FBAR UV sensor was proposed to be due to the density decrease in ZnO film upon UV illumination. When UV was incident on the ZnO film, it can cause oxygen desorption from the ZnO surface, resulting in density decrease in the film. This study has proven the feasibility of detection of low intensity UV using ZnO film based FBAR.

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Film bulk acoustic-wave resonator based ultraviolet sensor

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