Film bulk acoustic-wave resonator based ultraviolet sensor

X. Qiu, J. Zhu, J. Oiler, C. Yu, Z. Wang, H. Yu

Research output: Contribution to journalArticle

58 Scopus citations

Abstract

This letter described ultraviolet (UV) radiation sensing with ZnO based film bulk acoustic-wave resonator (FBAR). The resonant frequency upshifted when there was UV illumination on the FBAR. For 365 nm UV light, the frequency upshift was 9.8 kHz with an intensity of 600 μW/ cm2, and the detection limit of the sensor was 6.5 nW. The frequency increase in the FBAR UV sensor was proposed to be due to the density decrease in ZnO film upon UV illumination. When UV was incident on the ZnO film, it can cause oxygen desorption from the ZnO surface, resulting in density decrease in the film. This study has proven the feasibility of detection of low intensity UV using ZnO film based FBAR.

Original languageEnglish (US)
Article number151917
JournalApplied Physics Letters
Volume94
Issue number15
DOIs
StatePublished - Apr 27 2009

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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    Qiu, X., Zhu, J., Oiler, J., Yu, C., Wang, Z., & Yu, H. (2009). Film bulk acoustic-wave resonator based ultraviolet sensor. Applied Physics Letters, 94(15), [151917]. https://doi.org/10.1063/1.3122342