Film bulk acoustic-wave resonator based ultraviolet sensor

X. Qiu, J. Zhu, J. Oiler, C. Yu, Z. Wang, H. Yu

Research output: Contribution to journalArticle

57 Citations (Scopus)

Abstract

This letter described ultraviolet (UV) radiation sensing with ZnO based film bulk acoustic-wave resonator (FBAR). The resonant frequency upshifted when there was UV illumination on the FBAR. For 365 nm UV light, the frequency upshift was 9.8 kHz with an intensity of 600 μW/ cm2, and the detection limit of the sensor was 6.5 nW. The frequency increase in the FBAR UV sensor was proposed to be due to the density decrease in ZnO film upon UV illumination. When UV was incident on the ZnO film, it can cause oxygen desorption from the ZnO surface, resulting in density decrease in the film. This study has proven the feasibility of detection of low intensity UV using ZnO film based FBAR.

Original languageEnglish (US)
Article number151917
JournalApplied Physics Letters
Volume94
Issue number15
DOIs
StatePublished - 2009

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resonators
acoustics
sensors
ultraviolet radiation
illumination
resonant frequencies
desorption
causes
oxygen

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Qiu, X., Zhu, J., Oiler, J., Yu, C., Wang, Z., & Yu, H. (2009). Film bulk acoustic-wave resonator based ultraviolet sensor. Applied Physics Letters, 94(15), [151917]. https://doi.org/10.1063/1.3122342

Film bulk acoustic-wave resonator based ultraviolet sensor. / Qiu, X.; Zhu, J.; Oiler, J.; Yu, C.; Wang, Z.; Yu, H.

In: Applied Physics Letters, Vol. 94, No. 15, 151917, 2009.

Research output: Contribution to journalArticle

Qiu, X, Zhu, J, Oiler, J, Yu, C, Wang, Z & Yu, H 2009, 'Film bulk acoustic-wave resonator based ultraviolet sensor', Applied Physics Letters, vol. 94, no. 15, 151917. https://doi.org/10.1063/1.3122342
Qiu, X. ; Zhu, J. ; Oiler, J. ; Yu, C. ; Wang, Z. ; Yu, H. / Film bulk acoustic-wave resonator based ultraviolet sensor. In: Applied Physics Letters. 2009 ; Vol. 94, No. 15.
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