Femtogram mass sensing platform based on lateral extensional mode piezoelectric resonator

Wei Pang, Le Yan, Hao Zhang, Hongyu Yu, Eun Sok Kim, William C. Tang

Research output: Contribution to journalArticle

43 Citations (Scopus)

Abstract

This letter introduces a resonant mass sensor that is based on a lateral extensional mode piezoelectric resonator and has a minimum detectable mass of 10-15 g at room temperature and atmospheric pressure. The resonator with size of about 200×50×1 μ m3 has a quality factor (Q) of >1400 at 60 MHz, and as small as 0.1 ppm shift of its resonant frequency can be detected. The 0.1 ppm detection capability corresponds to a mass uncertainty of only about 4.6 fg. We have experimentally demonstrated a minimum detectable frequency shift of ∼1.6 ppm due to absorption of isopropanol vapor (73 fg) on the sidewalls of the parylene-coated lateral extensional mode piezoelectric resonator.

Original languageEnglish (US)
Article number243503
JournalApplied Physics Letters
Volume88
Issue number24
DOIs
StatePublished - Jun 12 2006
Externally publishedYes

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platforms
resonators
frequency shift
resonant frequencies
Q factors
atmospheric pressure
vapors
shift
sensors
room temperature

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Femtogram mass sensing platform based on lateral extensional mode piezoelectric resonator. / Pang, Wei; Yan, Le; Zhang, Hao; Yu, Hongyu; Kim, Eun Sok; Tang, William C.

In: Applied Physics Letters, Vol. 88, No. 24, 243503, 12.06.2006.

Research output: Contribution to journalArticle

Pang, Wei ; Yan, Le ; Zhang, Hao ; Yu, Hongyu ; Kim, Eun Sok ; Tang, William C. / Femtogram mass sensing platform based on lateral extensional mode piezoelectric resonator. In: Applied Physics Letters. 2006 ; Vol. 88, No. 24.
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