Femtogram mass sensing platform based on lateral extensional mode piezoelectric resonator

Wei Pang, Le Yan, Hao Zhang, Hongyu Yu, Eun Sok Kim, William C. Tang

Research output: Contribution to journalArticle

46 Scopus citations

Abstract

This letter introduces a resonant mass sensor that is based on a lateral extensional mode piezoelectric resonator and has a minimum detectable mass of 10-15 g at room temperature and atmospheric pressure. The resonator with size of about 200×50×1 μ m3 has a quality factor (Q) of >1400 at 60 MHz, and as small as 0.1 ppm shift of its resonant frequency can be detected. The 0.1 ppm detection capability corresponds to a mass uncertainty of only about 4.6 fg. We have experimentally demonstrated a minimum detectable frequency shift of ∼1.6 ppm due to absorption of isopropanol vapor (73 fg) on the sidewalls of the parylene-coated lateral extensional mode piezoelectric resonator.

Original languageEnglish (US)
Article number243503
JournalApplied Physics Letters
Volume88
Issue number24
DOIs
StatePublished - Jun 12 2006

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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