Feature-scale process simulation and accurate capacitance extraction for the backend of a 100-nm aluminium/TEOS process

Clemens Heitzinger, Alireza Sheikholeslami, Fuad Badrieh, Helmut Puchner, Siegfried Selberherr

Research output: Contribution to journalArticle

10 Scopus citations

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Chemical Compounds

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Physics & Astronomy