Factors limiting the spatial resolution and sensitivity of EELS microanalysis in a STEM

J. K. Weiss, Ray Carpenter

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

The experimental parameters which limit the spatial resolution and sensitivity of parallel electron-energy-loss microanalysis have been reviewed in order to determine the limiting factors over a range of experimental conditions. The effects of the signal-detector characteristics and electron optics on the performance of the microanalytical technique have been quantified. The importance of statistical considerations (signal-to-noise ratios) and the specimen itself are considered in order to develop a non-arbitrary definition of microanalytical performance based not only on the electron beam dimensions, but also incorporating other experimental limitations.

Original languageEnglish (US)
Pages (from-to)339-351
Number of pages13
JournalUltramicroscopy
Volume40
Issue number3
DOIs
StatePublished - Mar 1992

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation

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