Factors limiting the spatial resolution and sensitivity of EELS microanalysis in a STEM

J. K. Weiss; Ray Carpenter

doi:10.1016/0304-3991(92)90131-3

Factors limiting the spatial resolution and sensitivity of EELS microanalysis in a STEM

J. K. Weiss, Ray Carpenter

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

The experimental parameters which limit the spatial resolution and sensitivity of parallel electron-energy-loss microanalysis have been reviewed in order to determine the limiting factors over a range of experimental conditions. The effects of the signal-detector characteristics and electron optics on the performance of the microanalytical technique have been quantified. The importance of statistical considerations (signal-to-noise ratios) and the specimen itself are considered in order to develop a non-arbitrary definition of microanalytical performance based not only on the electron beam dimensions, but also incorporating other experimental limitations.

Original language	English (US)
Pages (from-to)	339-351
Number of pages	13
Journal	Ultramicroscopy
Volume	40
Issue number	3
DOIs	https://doi.org/10.1016/0304-3991(92)90131-3
State	Published - Mar 1992

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Instrumentation

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10.1016/0304-3991(92)90131-3

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title = "Factors limiting the spatial resolution and sensitivity of EELS microanalysis in a STEM",

abstract = "The experimental parameters which limit the spatial resolution and sensitivity of parallel electron-energy-loss microanalysis have been reviewed in order to determine the limiting factors over a range of experimental conditions. The effects of the signal-detector characteristics and electron optics on the performance of the microanalytical technique have been quantified. The importance of statistical considerations (signal-to-noise ratios) and the specimen itself are considered in order to develop a non-arbitrary definition of microanalytical performance based not only on the electron beam dimensions, but also incorporating other experimental limitations.",

author = "Weiss, {J. K.} and Ray Carpenter",

note = "Funding Information: many useful and enhghtening discussions This research was supported by the US Dept of Energy, Office of Basic Energy Sciences, Dlv of Materials Sciences grant no DE-FG02-87ER 45305, and the experimental work was carried out in the National Facility for High-Resolution Electron Microscopy within the Center for Solid State Science at Arizona State University, supported by NSF grant no DMR-89-13384",

year = "1992",

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doi = "10.1016/0304-3991(92)90131-3",

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AU - Weiss, J. K.

AU - Carpenter, Ray

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AB - The experimental parameters which limit the spatial resolution and sensitivity of parallel electron-energy-loss microanalysis have been reviewed in order to determine the limiting factors over a range of experimental conditions. The effects of the signal-detector characteristics and electron optics on the performance of the microanalytical technique have been quantified. The importance of statistical considerations (signal-to-noise ratios) and the specimen itself are considered in order to develop a non-arbitrary definition of microanalytical performance based not only on the electron beam dimensions, but also incorporating other experimental limitations.

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Factors limiting the spatial resolution and sensitivity of EELS microanalysis in a STEM

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