Fabrication of ultrathin metallic membranes on ceramic supports by sputter deposition

V. Jayaraman, Y. S. Lin, M. Pakala, R. Y. Lin

Research output: Contribution to journalArticle

127 Scopus citations

Abstract

The present work focuses on the synthesis of ultrathin palladium films (< 500 nm) grown on porous ceramic supports by the sputter deposition technique. The following two parameters were found most critical to the synthesis of the gas-tight metal-ceramic composite: substrate type (surface roughness) and the deposition temperature. Fairly gas-tight Pd films with good adhesion could be coated on sol-gel derived fine pore γ-alumina supports but not on coarse α-alumina supports. Poor adhesion between the coated film and the γ-alumina support was observed for films coated at room temperature, to a thickness of 300 nm or larger. Both coating temperature (80-600°C) and substrate type affect the grain size, nitrogen gas-tightness and the adhesion of the deposited metallic films. Characterization results show that 400°C is the optimum coating temperature. XRD and SEM data on these films show that the films are fairly crystalline, with a uniform and smooth surface morphology.

Original languageEnglish (US)
Pages (from-to)89-100
Number of pages12
JournalJournal of Membrane Science
Volume99
Issue number1
DOIs
StatePublished - Feb 14 1995

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Keywords

  • Composite membranes
  • Gas separations
  • Inorganic membranes
  • Membrane preparation and structure
  • Metal membranes

ASJC Scopus subject areas

  • Biochemistry
  • Materials Science(all)
  • Physical and Theoretical Chemistry
  • Filtration and Separation

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