Fabrication of ultrathin metallic membranes on ceramic supports by sputter deposition

V. Jayaraman, Jerry Lin, M. Pakala, R. Y. Lin

Research output: Contribution to journalArticle

127 Citations (Scopus)

Abstract

The present work focuses on the synthesis of ultrathin palladium films (< 500 nm) grown on porous ceramic supports by the sputter deposition technique. The following two parameters were found most critical to the synthesis of the gas-tight metal-ceramic composite: substrate type (surface roughness) and the deposition temperature. Fairly gas-tight Pd films with good adhesion could be coated on sol-gel derived fine pore γ-alumina supports but not on coarse α-alumina supports. Poor adhesion between the coated film and the γ-alumina support was observed for films coated at room temperature, to a thickness of 300 nm or larger. Both coating temperature (80-600°C) and substrate type affect the grain size, nitrogen gas-tightness and the adhesion of the deposited metallic films. Characterization results show that 400°C is the optimum coating temperature. XRD and SEM data on these films show that the films are fairly crystalline, with a uniform and smooth surface morphology.

Original languageEnglish (US)
Pages (from-to)89-100
Number of pages12
JournalJournal of Membrane Science
Volume99
Issue number1
DOIs
StatePublished - Feb 14 1995
Externally publishedYes

Fingerprint

Sputter deposition
Ceramics
Aluminum Oxide
ceramics
membranes
Membranes
Fabrication
fabrication
Temperature
Gases
Alumina
Adhesion
adhesion
aluminum oxides
Palladium
Polymethyl Methacrylate
Coatings
gases
Metallic films
Nitrogen

Keywords

  • Composite membranes
  • Gas separations
  • Inorganic membranes
  • Membrane preparation and structure
  • Metal membranes

ASJC Scopus subject areas

  • Biochemistry
  • Filtration and Separation
  • Physical and Theoretical Chemistry
  • Materials Science(all)
  • Polymers and Plastics

Cite this

Fabrication of ultrathin metallic membranes on ceramic supports by sputter deposition. / Jayaraman, V.; Lin, Jerry; Pakala, M.; Lin, R. Y.

In: Journal of Membrane Science, Vol. 99, No. 1, 14.02.1995, p. 89-100.

Research output: Contribution to journalArticle

Jayaraman, V. ; Lin, Jerry ; Pakala, M. ; Lin, R. Y. / Fabrication of ultrathin metallic membranes on ceramic supports by sputter deposition. In: Journal of Membrane Science. 1995 ; Vol. 99, No. 1. pp. 89-100.
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